JPS5475985A - Heat treatment method of semiconductor substrate and its unit - Google Patents
Heat treatment method of semiconductor substrate and its unitInfo
- Publication number
- JPS5475985A JPS5475985A JP14345577A JP14345577A JPS5475985A JP S5475985 A JPS5475985 A JP S5475985A JP 14345577 A JP14345577 A JP 14345577A JP 14345577 A JP14345577 A JP 14345577A JP S5475985 A JPS5475985 A JP S5475985A
- Authority
- JP
- Japan
- Prior art keywords
- boats
- heat treatment
- boat
- support materials
- convexes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title abstract 6
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
- 239000000463 material Substances 0.000 abstract 4
- 238000009792 diffusion process Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000002474 experimental method Methods 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14345577A JPS5475985A (en) | 1977-11-29 | 1977-11-29 | Heat treatment method of semiconductor substrate and its unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14345577A JPS5475985A (en) | 1977-11-29 | 1977-11-29 | Heat treatment method of semiconductor substrate and its unit |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15902685A Division JPS6144425A (ja) | 1985-07-18 | 1985-07-18 | 半導体基板の熱処理用ボート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5475985A true JPS5475985A (en) | 1979-06-18 |
| JPS6122856B2 JPS6122856B2 (enrdf_load_stackoverflow) | 1986-06-03 |
Family
ID=15339093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14345577A Granted JPS5475985A (en) | 1977-11-29 | 1977-11-29 | Heat treatment method of semiconductor substrate and its unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5475985A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961534U (ja) * | 1982-10-15 | 1984-04-23 | 日本電気株式会社 | 搬送用ボ−ト |
| JPS61110444A (ja) * | 1984-11-02 | 1986-05-28 | ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング | 保持格子囲い |
| US6799940B2 (en) | 2002-12-05 | 2004-10-05 | Tokyo Electron Limited | Removable semiconductor wafer susceptor |
-
1977
- 1977-11-29 JP JP14345577A patent/JPS5475985A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961534U (ja) * | 1982-10-15 | 1984-04-23 | 日本電気株式会社 | 搬送用ボ−ト |
| JPS61110444A (ja) * | 1984-11-02 | 1986-05-28 | ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング | 保持格子囲い |
| US6799940B2 (en) | 2002-12-05 | 2004-10-05 | Tokyo Electron Limited | Removable semiconductor wafer susceptor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6122856B2 (enrdf_load_stackoverflow) | 1986-06-03 |
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