JPS5467762A - Scribing device of semiconductor substrates - Google Patents
Scribing device of semiconductor substratesInfo
- Publication number
- JPS5467762A JPS5467762A JP13423177A JP13423177A JPS5467762A JP S5467762 A JPS5467762 A JP S5467762A JP 13423177 A JP13423177 A JP 13423177A JP 13423177 A JP13423177 A JP 13423177A JP S5467762 A JPS5467762 A JP S5467762A
- Authority
- JP
- Japan
- Prior art keywords
- scribed
- scribing
- semiconductor substrates
- semiconductor substrate
- turned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13423177A JPS5467762A (en) | 1977-11-09 | 1977-11-09 | Scribing device of semiconductor substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13423177A JPS5467762A (en) | 1977-11-09 | 1977-11-09 | Scribing device of semiconductor substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5467762A true JPS5467762A (en) | 1979-05-31 |
Family
ID=15123482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13423177A Pending JPS5467762A (en) | 1977-11-09 | 1977-11-09 | Scribing device of semiconductor substrates |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5467762A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7377979B2 (en) | 2002-01-24 | 2008-05-27 | Three Bond Co., Ltd. | Material coating device |
-
1977
- 1977-11-09 JP JP13423177A patent/JPS5467762A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7377979B2 (en) | 2002-01-24 | 2008-05-27 | Three Bond Co., Ltd. | Material coating device |
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