JPS5465393A - Thin film resistor - Google Patents

Thin film resistor

Info

Publication number
JPS5465393A
JPS5465393A JP13099077A JP13099077A JPS5465393A JP S5465393 A JPS5465393 A JP S5465393A JP 13099077 A JP13099077 A JP 13099077A JP 13099077 A JP13099077 A JP 13099077A JP S5465393 A JPS5465393 A JP S5465393A
Authority
JP
Japan
Prior art keywords
substrate
thin film
procedure
spattering
film resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13099077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5724001B2 (OSRAM
Inventor
Toshitami Hara
Akira Niimi
Masahisa Fukui
Yoshiki Hajimoto
Yoshiaki Shirato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13099077A priority Critical patent/JPS5465393A/ja
Publication of JPS5465393A publication Critical patent/JPS5465393A/ja
Publication of JPS5724001B2 publication Critical patent/JPS5724001B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
JP13099077A 1977-11-01 1977-11-01 Thin film resistor Granted JPS5465393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13099077A JPS5465393A (en) 1977-11-01 1977-11-01 Thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13099077A JPS5465393A (en) 1977-11-01 1977-11-01 Thin film resistor

Publications (2)

Publication Number Publication Date
JPS5465393A true JPS5465393A (en) 1979-05-25
JPS5724001B2 JPS5724001B2 (OSRAM) 1982-05-21

Family

ID=15047335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13099077A Granted JPS5465393A (en) 1977-11-01 1977-11-01 Thin film resistor

Country Status (1)

Country Link
JP (1) JPS5465393A (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5463295A (en) * 1977-10-28 1979-05-22 Canon Inc Thermal head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5463295A (en) * 1977-10-28 1979-05-22 Canon Inc Thermal head

Also Published As

Publication number Publication date
JPS5724001B2 (OSRAM) 1982-05-21

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