JPS5459090A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS5459090A JPS5459090A JP12631977A JP12631977A JPS5459090A JP S5459090 A JPS5459090 A JP S5459090A JP 12631977 A JP12631977 A JP 12631977A JP 12631977 A JP12631977 A JP 12631977A JP S5459090 A JPS5459090 A JP S5459090A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- manufacture
- semiconductor device
- reduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12631977A JPS5459090A (en) | 1977-10-19 | 1977-10-19 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12631977A JPS5459090A (en) | 1977-10-19 | 1977-10-19 | Semiconductor device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5459090A true JPS5459090A (en) | 1979-05-12 |
Family
ID=14932235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12631977A Pending JPS5459090A (en) | 1977-10-19 | 1977-10-19 | Semiconductor device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5459090A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5674943A (en) * | 1979-11-26 | 1981-06-20 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor device |
JPS57148365A (en) * | 1981-03-10 | 1982-09-13 | Nec Corp | Semiconductor device and manufacture thereof |
JPS6115368A (ja) * | 1984-07-02 | 1986-01-23 | Nippon Telegr & Teleph Corp <Ntt> | 電荷転送装置およびその製造方法 |
JPH01223769A (ja) * | 1988-03-03 | 1989-09-06 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
US4968636A (en) * | 1988-09-14 | 1990-11-06 | Oki Electric Industry Co., Ltd. | Embedded isolation region and process for forming the same on silicon substrate |
US5080730A (en) * | 1989-04-24 | 1992-01-14 | Ibis Technology Corporation | Implantation profile control with surface sputtering |
US5143858A (en) * | 1990-04-02 | 1992-09-01 | Motorola, Inc. | Method of fabricating buried insulating layers |
-
1977
- 1977-10-19 JP JP12631977A patent/JPS5459090A/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5674943A (en) * | 1979-11-26 | 1981-06-20 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor device |
JPS57148365A (en) * | 1981-03-10 | 1982-09-13 | Nec Corp | Semiconductor device and manufacture thereof |
JPS6115368A (ja) * | 1984-07-02 | 1986-01-23 | Nippon Telegr & Teleph Corp <Ntt> | 電荷転送装置およびその製造方法 |
JPH01223769A (ja) * | 1988-03-03 | 1989-09-06 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
US4968636A (en) * | 1988-09-14 | 1990-11-06 | Oki Electric Industry Co., Ltd. | Embedded isolation region and process for forming the same on silicon substrate |
US5080730A (en) * | 1989-04-24 | 1992-01-14 | Ibis Technology Corporation | Implantation profile control with surface sputtering |
US5143858A (en) * | 1990-04-02 | 1992-09-01 | Motorola, Inc. | Method of fabricating buried insulating layers |
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