JPS5458689A - Method and apparatus for liquid phase epitaxial growth - Google Patents

Method and apparatus for liquid phase epitaxial growth

Info

Publication number
JPS5458689A
JPS5458689A JP12630277A JP12630277A JPS5458689A JP S5458689 A JPS5458689 A JP S5458689A JP 12630277 A JP12630277 A JP 12630277A JP 12630277 A JP12630277 A JP 12630277A JP S5458689 A JPS5458689 A JP S5458689A
Authority
JP
Japan
Prior art keywords
liq
molten
vessel
plate
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12630277A
Other languages
Japanese (ja)
Other versions
JPS617007B2 (en
Inventor
Isamu Sakuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12630277A priority Critical patent/JPS5458689A/en
Publication of JPS5458689A publication Critical patent/JPS5458689A/en
Publication of JPS617007B2 publication Critical patent/JPS617007B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE: To grow a uniform epitaxial layer, by growing the first epitaxial layer on the surface of a substrate crystal, by washing the adhered molten liq. through contact with the senond layer-forming molten liq., then by contact of the first epitaxial layer with fresh motlen liq. in order to decrease the mixing of the both molten liqs.
CONSTITUTION: Molten liq. vessel 16W19 formed by a molten-liq. vessel plate 2 are made to unite with molten-liq.-dividing spaces 12W15 formed by a molten-liq. 4W7 fed to the vessel 16W19. Then the plate 2 is moved in the direction of an arrow, so that portions of the liq. 4W7 are divided into the spaces 12W15 by the bottom of the plate 2 facing the vessel 16W19, simultaneously united vessels 9W11 are filled with the liq. 5W7. The plate 1 is moved so as to make the substrate crystal 3 contact with the liq. 4, and cooled showly to grow the first epitaxial layer on the surface of the crystal 3. Hereafter, the plate is moved once again to make the crystal 3 pass through the liq. 5 of the vessel 9 in order to wash it, then it is made to contact with the liq. 5 divided into the space 13 to cause the second layer to grow. The third and fourth growth are conducted in the similar way
COPYRIGHT: (C)1979,JPO&Japio
JP12630277A 1977-10-19 1977-10-19 Method and apparatus for liquid phase epitaxial growth Granted JPS5458689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12630277A JPS5458689A (en) 1977-10-19 1977-10-19 Method and apparatus for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12630277A JPS5458689A (en) 1977-10-19 1977-10-19 Method and apparatus for liquid phase epitaxial growth

Publications (2)

Publication Number Publication Date
JPS5458689A true JPS5458689A (en) 1979-05-11
JPS617007B2 JPS617007B2 (en) 1986-03-03

Family

ID=14931829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12630277A Granted JPS5458689A (en) 1977-10-19 1977-10-19 Method and apparatus for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5458689A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0421132Y2 (en) * 1987-06-29 1992-05-14

Also Published As

Publication number Publication date
JPS617007B2 (en) 1986-03-03

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