Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP2360976ApriorityCriticalpatent/JPS52106380A/en
Publication of JPS52106380ApublicationCriticalpatent/JPS52106380A/en
PURPOSE: To produce epitaxial layer of even thickness and multiple epitaxial layer having excellent joint surface by means of placing plural solutions separately in a furnace and contacting base plate to the solution in order.
COPYRIGHT: (C)1977,JPO&Japio
JP2360976A1976-03-041976-03-04Liquid phase epitaxial growth of crystal
PendingJPS52106380A
(en)