JPS54582A - Soft x-ray exposure method - Google Patents

Soft x-ray exposure method

Info

Publication number
JPS54582A
JPS54582A JP6461377A JP6461377A JPS54582A JP S54582 A JPS54582 A JP S54582A JP 6461377 A JP6461377 A JP 6461377A JP 6461377 A JP6461377 A JP 6461377A JP S54582 A JPS54582 A JP S54582A
Authority
JP
Japan
Prior art keywords
soft
exposure method
ray exposure
mask
setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6461377A
Other languages
Japanese (ja)
Inventor
Hisashi Nakatsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6461377A priority Critical patent/JPS54582A/en
Publication of JPS54582A publication Critical patent/JPS54582A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain patterns of micron or submicron order with good accuracy by setting the radiation angle of inclination of soft X-rays for a mask at 16 to 32° and setting the distance between the mask and a photosensitive material at 50 μm under.
COPYRIGHT: (C)1979,JPO&Japio
JP6461377A 1977-06-03 1977-06-03 Soft x-ray exposure method Pending JPS54582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6461377A JPS54582A (en) 1977-06-03 1977-06-03 Soft x-ray exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6461377A JPS54582A (en) 1977-06-03 1977-06-03 Soft x-ray exposure method

Publications (1)

Publication Number Publication Date
JPS54582A true JPS54582A (en) 1979-01-05

Family

ID=13263279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6461377A Pending JPS54582A (en) 1977-06-03 1977-06-03 Soft x-ray exposure method

Country Status (1)

Country Link
JP (1) JPS54582A (en)

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