JPS5451489A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS5451489A
JPS5451489A JP11753877A JP11753877A JPS5451489A JP S5451489 A JPS5451489 A JP S5451489A JP 11753877 A JP11753877 A JP 11753877A JP 11753877 A JP11753877 A JP 11753877A JP S5451489 A JPS5451489 A JP S5451489A
Authority
JP
Japan
Prior art keywords
layers
diffusion resistance
pressure
error due
bridge circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11753877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222272B2 (enrdf_load_stackoverflow
Inventor
Susumu Kimijima
Ryuzo Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11753877A priority Critical patent/JPS5451489A/ja
Publication of JPS5451489A publication Critical patent/JPS5451489A/ja
Publication of JPS6222272B2 publication Critical patent/JPS6222272B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP11753877A 1977-09-30 1977-09-30 Semiconductor pressure converter Granted JPS5451489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11753877A JPS5451489A (en) 1977-09-30 1977-09-30 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11753877A JPS5451489A (en) 1977-09-30 1977-09-30 Semiconductor pressure converter

Publications (2)

Publication Number Publication Date
JPS5451489A true JPS5451489A (en) 1979-04-23
JPS6222272B2 JPS6222272B2 (enrdf_load_stackoverflow) 1987-05-16

Family

ID=14714266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11753877A Granted JPS5451489A (en) 1977-09-30 1977-09-30 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS5451489A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120142A (ja) * 1982-01-04 1983-07-16 ハネウエル・インコ−ポレ−テツド 半導体圧力変換器
JPS60138431A (ja) * 1983-09-28 1985-07-23 シユラムバ−ガ−　オ−バ−シ−ズ　ソシエテ　アノニム 表面音波センサ
JPS60247129A (ja) * 1984-05-21 1985-12-06 Nippon Soken Inc 高圧用圧力検出器
JPS6156465A (ja) * 1984-08-28 1986-03-22 Toshiba Corp 半導体圧力変換器
JPS61107774A (ja) * 1984-10-30 1986-05-26 バア−−ブラウン　コ−ポレ−シヨン 圧力感知装置及びその製作方法
WO2014132730A1 (ja) * 2013-02-28 2014-09-04 日立オートモティブシステムズ株式会社 圧力検出装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945783A (en) * 1972-07-07 1974-05-01 Siemens Ag Zerotengosano hoshokairosochi
JPS5016486A (enrdf_load_stackoverflow) * 1973-06-11 1975-02-21
JPS5182680A (enrdf_load_stackoverflow) * 1974-11-27 1976-07-20 Itt
JPS5245377A (en) * 1975-10-08 1977-04-09 Hitachi Ltd Silicon mechanical-electrical converter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945783A (en) * 1972-07-07 1974-05-01 Siemens Ag Zerotengosano hoshokairosochi
JPS5016486A (enrdf_load_stackoverflow) * 1973-06-11 1975-02-21
JPS5182680A (enrdf_load_stackoverflow) * 1974-11-27 1976-07-20 Itt
JPS5245377A (en) * 1975-10-08 1977-04-09 Hitachi Ltd Silicon mechanical-electrical converter

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120142A (ja) * 1982-01-04 1983-07-16 ハネウエル・インコ−ポレ−テツド 半導体圧力変換器
JPS60138431A (ja) * 1983-09-28 1985-07-23 シユラムバ−ガ−　オ−バ−シ−ズ　ソシエテ　アノニム 表面音波センサ
JPS60247129A (ja) * 1984-05-21 1985-12-06 Nippon Soken Inc 高圧用圧力検出器
JPS6156465A (ja) * 1984-08-28 1986-03-22 Toshiba Corp 半導体圧力変換器
JPS61107774A (ja) * 1984-10-30 1986-05-26 バア−−ブラウン　コ−ポレ−シヨン 圧力感知装置及びその製作方法
WO2014132730A1 (ja) * 2013-02-28 2014-09-04 日立オートモティブシステムズ株式会社 圧力検出装置
JP2014167420A (ja) * 2013-02-28 2014-09-11 Hitachi Automotive Systems Ltd 圧力検出装置
US9739676B2 (en) 2013-02-28 2017-08-22 Hitachi Automotive Systems, Ltd. Pressure detecting device

Also Published As

Publication number Publication date
JPS6222272B2 (enrdf_load_stackoverflow) 1987-05-16

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