JPS6222272B2 - - Google Patents

Info

Publication number
JPS6222272B2
JPS6222272B2 JP52117538A JP11753877A JPS6222272B2 JP S6222272 B2 JPS6222272 B2 JP S6222272B2 JP 52117538 A JP52117538 A JP 52117538A JP 11753877 A JP11753877 A JP 11753877A JP S6222272 B2 JPS6222272 B2 JP S6222272B2
Authority
JP
Japan
Prior art keywords
pressure
diffused
resistance layer
semiconductor
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52117538A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5451489A (en
Inventor
Susumu Kimijima
Ryuzo Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11753877A priority Critical patent/JPS5451489A/ja
Publication of JPS5451489A publication Critical patent/JPS5451489A/ja
Publication of JPS6222272B2 publication Critical patent/JPS6222272B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP11753877A 1977-09-30 1977-09-30 Semiconductor pressure converter Granted JPS5451489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11753877A JPS5451489A (en) 1977-09-30 1977-09-30 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11753877A JPS5451489A (en) 1977-09-30 1977-09-30 Semiconductor pressure converter

Publications (2)

Publication Number Publication Date
JPS5451489A JPS5451489A (en) 1979-04-23
JPS6222272B2 true JPS6222272B2 (enrdf_load_stackoverflow) 1987-05-16

Family

ID=14714266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11753877A Granted JPS5451489A (en) 1977-09-30 1977-09-30 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS5451489A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1186163A (en) * 1982-01-04 1985-04-30 James B. Starr Semiconductor pressure transducer
JPS60138431A (ja) * 1983-09-28 1985-07-23 シユラムバ−ガ−　オ−バ−シ−ズ　ソシエテ　アノニム 表面音波センサ
JPH0650270B2 (ja) * 1984-05-21 1994-06-29 株式会社日本自動車部品総合研究所 高圧用圧力検出器
JPS6156465A (ja) * 1984-08-28 1986-03-22 Toshiba Corp 半導体圧力変換器
US4672853A (en) * 1984-10-30 1987-06-16 Burr-Brown Corporation Apparatus and method for a pressure-sensitive device
JP6090742B2 (ja) * 2013-02-28 2017-03-08 日立オートモティブシステムズ株式会社 圧力検出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945783A (en) * 1972-07-07 1974-05-01 Siemens Ag Zerotengosano hoshokairosochi
JPS5519433B2 (enrdf_load_stackoverflow) * 1973-06-11 1980-05-26
US3910106A (en) * 1974-11-27 1975-10-07 Itt Transducer
JPS5245377A (en) * 1975-10-08 1977-04-09 Hitachi Ltd Silicon mechanical-electrical converter

Also Published As

Publication number Publication date
JPS5451489A (en) 1979-04-23

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