JPS544077A - Photo mask for far ultraviolet ray exposure - Google Patents
Photo mask for far ultraviolet ray exposureInfo
- Publication number
- JPS544077A JPS544077A JP6880477A JP6880477A JPS544077A JP S544077 A JPS544077 A JP S544077A JP 6880477 A JP6880477 A JP 6880477A JP 6880477 A JP6880477 A JP 6880477A JP S544077 A JPS544077 A JP S544077A
- Authority
- JP
- Japan
- Prior art keywords
- photo mask
- ultraviolet ray
- ray exposure
- far ultraviolet
- durability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
PURPOSE: To establish the photo mask having sharp picture, excellent machinability and durability, by providing chromium single thin film 400 to 1000Å in film thickness on a quartz glass substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6880477A JPS544077A (en) | 1977-06-13 | 1977-06-13 | Photo mask for far ultraviolet ray exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6880477A JPS544077A (en) | 1977-06-13 | 1977-06-13 | Photo mask for far ultraviolet ray exposure |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544077A true JPS544077A (en) | 1979-01-12 |
Family
ID=13384261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6880477A Pending JPS544077A (en) | 1977-06-13 | 1977-06-13 | Photo mask for far ultraviolet ray exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544077A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7309949B2 (en) | 2004-03-03 | 2007-12-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive ceramic and piezoelectric/electrostrictive film type device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493231A (en) * | 1972-04-22 | 1974-01-12 |
-
1977
- 1977-06-13 JP JP6880477A patent/JPS544077A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493231A (en) * | 1972-04-22 | 1974-01-12 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7309949B2 (en) | 2004-03-03 | 2007-12-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive ceramic and piezoelectric/electrostrictive film type device |
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