JPS544077A - Photo mask for far ultraviolet ray exposure - Google Patents

Photo mask for far ultraviolet ray exposure

Info

Publication number
JPS544077A
JPS544077A JP6880477A JP6880477A JPS544077A JP S544077 A JPS544077 A JP S544077A JP 6880477 A JP6880477 A JP 6880477A JP 6880477 A JP6880477 A JP 6880477A JP S544077 A JPS544077 A JP S544077A
Authority
JP
Japan
Prior art keywords
photo mask
ultraviolet ray
ray exposure
far ultraviolet
durability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6880477A
Other languages
Japanese (ja)
Inventor
Yoshiaki Mimura
Takashi Okubo
Tatsuo Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6880477A priority Critical patent/JPS544077A/en
Publication of JPS544077A publication Critical patent/JPS544077A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

PURPOSE: To establish the photo mask having sharp picture, excellent machinability and durability, by providing chromium single thin film 400 to 1000Å in film thickness on a quartz glass substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP6880477A 1977-06-13 1977-06-13 Photo mask for far ultraviolet ray exposure Pending JPS544077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6880477A JPS544077A (en) 1977-06-13 1977-06-13 Photo mask for far ultraviolet ray exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6880477A JPS544077A (en) 1977-06-13 1977-06-13 Photo mask for far ultraviolet ray exposure

Publications (1)

Publication Number Publication Date
JPS544077A true JPS544077A (en) 1979-01-12

Family

ID=13384261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6880477A Pending JPS544077A (en) 1977-06-13 1977-06-13 Photo mask for far ultraviolet ray exposure

Country Status (1)

Country Link
JP (1) JPS544077A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7309949B2 (en) 2004-03-03 2007-12-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive ceramic and piezoelectric/electrostrictive film type device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493231A (en) * 1972-04-22 1974-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493231A (en) * 1972-04-22 1974-01-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7309949B2 (en) 2004-03-03 2007-12-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive ceramic and piezoelectric/electrostrictive film type device

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