JPS5422172A - Etching method for multiple semiconductor - Google Patents

Etching method for multiple semiconductor

Info

Publication number
JPS5422172A
JPS5422172A JP8775477A JP8775477A JPS5422172A JP S5422172 A JPS5422172 A JP S5422172A JP 8775477 A JP8775477 A JP 8775477A JP 8775477 A JP8775477 A JP 8775477A JP S5422172 A JPS5422172 A JP S5422172A
Authority
JP
Japan
Prior art keywords
multiple semiconductor
etching method
flaws
soaking
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8775477A
Other languages
English (en)
Other versions
JPS576694B2 (ja
Inventor
Koji Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8775477A priority Critical patent/JPS5422172A/ja
Publication of JPS5422172A publication Critical patent/JPS5422172A/ja
Publication of JPS576694B2 publication Critical patent/JPS576694B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP8775477A 1977-07-20 1977-07-20 Etching method for multiple semiconductor Granted JPS5422172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8775477A JPS5422172A (en) 1977-07-20 1977-07-20 Etching method for multiple semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8775477A JPS5422172A (en) 1977-07-20 1977-07-20 Etching method for multiple semiconductor

Publications (2)

Publication Number Publication Date
JPS5422172A true JPS5422172A (en) 1979-02-19
JPS576694B2 JPS576694B2 (ja) 1982-02-06

Family

ID=13923719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8775477A Granted JPS5422172A (en) 1977-07-20 1977-07-20 Etching method for multiple semiconductor

Country Status (1)

Country Link
JP (1) JPS5422172A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334394Y2 (ja) * 1985-06-14 1991-07-22

Also Published As

Publication number Publication date
JPS576694B2 (ja) 1982-02-06

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