JPS5414366A - Recovering method for pure water - Google Patents

Recovering method for pure water

Info

Publication number
JPS5414366A
JPS5414366A JP7948277A JP7948277A JPS5414366A JP S5414366 A JPS5414366 A JP S5414366A JP 7948277 A JP7948277 A JP 7948277A JP 7948277 A JP7948277 A JP 7948277A JP S5414366 A JPS5414366 A JP S5414366A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
water
pure water
washing
recovering method
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7948277A
Inventor
Nobuo Fujie
Mitsujiro Takahashi
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To recover the pure water cheaply, surely and efficiently, by performing the primary water-washing and the secondary water-washing of the wafers, etc. of the raw material for semiconductor in the separate water-washing tanks, discharging the pure water used for the primary water-washing and recovering and regenerating the pure water used for the secondary water-wahsing.
COPYRIGHT: (C)1979,JPO&Japio
JP7948277A 1977-07-05 1977-07-05 Recovering method for pure water Pending JPS5414366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7948277A JPS5414366A (en) 1977-07-05 1977-07-05 Recovering method for pure water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7948277A JPS5414366A (en) 1977-07-05 1977-07-05 Recovering method for pure water

Publications (1)

Publication Number Publication Date
JPS5414366A true true JPS5414366A (en) 1979-02-02

Family

ID=13691105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7948277A Pending JPS5414366A (en) 1977-07-05 1977-07-05 Recovering method for pure water

Country Status (1)

Country Link
JP (1) JPS5414366A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5951874A (en) * 1997-07-25 1999-09-14 Hydromatix, Inc. Method for minimizing wastewater discharge

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145434A (en) * 1975-06-10 1976-12-14 Hitachi Cable Metal pickling and washing system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145434A (en) * 1975-06-10 1976-12-14 Hitachi Cable Metal pickling and washing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5951874A (en) * 1997-07-25 1999-09-14 Hydromatix, Inc. Method for minimizing wastewater discharge

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