JPS5414366A - Recovering method for pure water - Google Patents
Recovering method for pure waterInfo
- Publication number
- JPS5414366A JPS5414366A JP7948277A JP7948277A JPS5414366A JP S5414366 A JPS5414366 A JP S5414366A JP 7948277 A JP7948277 A JP 7948277A JP 7948277 A JP7948277 A JP 7948277A JP S5414366 A JPS5414366 A JP S5414366A
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- water
- washing
- recovering method
- recovering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To recover the pure water cheaply, surely and efficiently, by performing the primary water-washing and the secondary water-washing of the wafers, etc. of the raw material for semiconductor in the separate water-washing tanks, discharging the pure water used for the primary water-washing and recovering and regenerating the pure water used for the secondary water-wahsing.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7948277A JPS5414366A (en) | 1977-07-05 | 1977-07-05 | Recovering method for pure water |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7948277A JPS5414366A (en) | 1977-07-05 | 1977-07-05 | Recovering method for pure water |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5414366A true JPS5414366A (en) | 1979-02-02 |
Family
ID=13691105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7948277A Pending JPS5414366A (en) | 1977-07-05 | 1977-07-05 | Recovering method for pure water |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5414366A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5951874A (en) * | 1997-07-25 | 1999-09-14 | Hydromatix, Inc. | Method for minimizing wastewater discharge |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145434A (en) * | 1975-06-10 | 1976-12-14 | Hitachi Cable | Metal pickling and washing system |
-
1977
- 1977-07-05 JP JP7948277A patent/JPS5414366A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145434A (en) * | 1975-06-10 | 1976-12-14 | Hitachi Cable | Metal pickling and washing system |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5951874A (en) * | 1997-07-25 | 1999-09-14 | Hydromatix, Inc. | Method for minimizing wastewater discharge |
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