JPS5216163A - Waste removal method - Google Patents

Waste removal method

Info

Publication number
JPS5216163A
JPS5216163A JP50091877A JP9187775A JPS5216163A JP S5216163 A JPS5216163 A JP S5216163A JP 50091877 A JP50091877 A JP 50091877A JP 9187775 A JP9187775 A JP 9187775A JP S5216163 A JPS5216163 A JP S5216163A
Authority
JP
Japan
Prior art keywords
removal method
waste removal
grooves
waste
continuously along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50091877A
Other languages
Japanese (ja)
Inventor
Akira Kabashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50091877A priority Critical patent/JPS5216163A/en
Publication of JPS5216163A publication Critical patent/JPS5216163A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To remove waste in the grooves completely by brushing continuously along the direction of service grooves.
COPYRIGHT: (C)1977,JPO&Japio
JP50091877A 1975-07-30 1975-07-30 Waste removal method Pending JPS5216163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091877A JPS5216163A (en) 1975-07-30 1975-07-30 Waste removal method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091877A JPS5216163A (en) 1975-07-30 1975-07-30 Waste removal method

Publications (1)

Publication Number Publication Date
JPS5216163A true JPS5216163A (en) 1977-02-07

Family

ID=14038778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091877A Pending JPS5216163A (en) 1975-07-30 1975-07-30 Waste removal method

Country Status (1)

Country Link
JP (1) JPS5216163A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613744A (en) * 1979-07-13 1981-02-10 Fujitsu Ltd Cutting method for wafer
JPS56141384U (en) * 1980-03-26 1981-10-26
JPS56154148U (en) * 1980-04-17 1981-11-18
JPS5753989U (en) * 1980-09-12 1982-03-29
JPS5790941A (en) * 1980-11-27 1982-06-05 Toshiba Corp Swing type vertical washer
JPS57102024A (en) * 1980-12-17 1982-06-24 Nec Kyushu Ltd Brush scrubber
JPS5859036U (en) * 1981-10-16 1983-04-21 日本電気株式会社 glass mask cleaning equipment
JPS6096825U (en) * 1983-12-07 1985-07-02 株式会社東芝 cleaning brush
JPS62122337U (en) * 1986-12-04 1987-08-03
JPS6349232U (en) * 1986-09-17 1988-04-04
JPH02109333A (en) * 1988-10-18 1990-04-23 Tokyo Electron Ltd Cleaning device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613744A (en) * 1979-07-13 1981-02-10 Fujitsu Ltd Cutting method for wafer
JPS56141384U (en) * 1980-03-26 1981-10-26
JPH0143861Y2 (en) * 1980-04-17 1989-12-19
JPS56154148U (en) * 1980-04-17 1981-11-18
JPS5753989U (en) * 1980-09-12 1982-03-29
JPS603015Y2 (en) * 1980-09-12 1985-01-28 本田技研工業株式会社 Motorcycle fairing device
JPS5790941A (en) * 1980-11-27 1982-06-05 Toshiba Corp Swing type vertical washer
JPS57102024A (en) * 1980-12-17 1982-06-24 Nec Kyushu Ltd Brush scrubber
JPS5859036U (en) * 1981-10-16 1983-04-21 日本電気株式会社 glass mask cleaning equipment
JPS6096825U (en) * 1983-12-07 1985-07-02 株式会社東芝 cleaning brush
JPS6349232U (en) * 1986-09-17 1988-04-04
JPS62122337U (en) * 1986-12-04 1987-08-03
JPH02109333A (en) * 1988-10-18 1990-04-23 Tokyo Electron Ltd Cleaning device

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