JPS544073A - Cleaning method for semiconductor surface - Google Patents
Cleaning method for semiconductor surfaceInfo
- Publication number
- JPS544073A JPS544073A JP6931277A JP6931277A JPS544073A JP S544073 A JPS544073 A JP S544073A JP 6931277 A JP6931277 A JP 6931277A JP 6931277 A JP6931277 A JP 6931277A JP S544073 A JPS544073 A JP S544073A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor surface
- cleaning method
- semiconductor
- damaging
- eliminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To clean the semiconductor surface without damaging the performance as a semiconductor element, by eliminating the contaminated material only through plasma emission on the semiconductor surface.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6931277A JPS544073A (en) | 1977-06-10 | 1977-06-10 | Cleaning method for semiconductor surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6931277A JPS544073A (en) | 1977-06-10 | 1977-06-10 | Cleaning method for semiconductor surface |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544073A true JPS544073A (en) | 1979-01-12 |
Family
ID=13398909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6931277A Pending JPS544073A (en) | 1977-06-10 | 1977-06-10 | Cleaning method for semiconductor surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544073A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098626A (en) * | 1983-11-02 | 1985-06-01 | Oki Electric Ind Co Ltd | Surface treating method of semiconductor layer |
JP2003309105A (en) * | 2002-04-15 | 2003-10-31 | Matsushita Electric Ind Co Ltd | Plasma treatment method |
-
1977
- 1977-06-10 JP JP6931277A patent/JPS544073A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098626A (en) * | 1983-11-02 | 1985-06-01 | Oki Electric Ind Co Ltd | Surface treating method of semiconductor layer |
JPH0329173B2 (en) * | 1983-11-02 | 1991-04-23 | Oki Electric Ind Co Ltd | |
JP2003309105A (en) * | 2002-04-15 | 2003-10-31 | Matsushita Electric Ind Co Ltd | Plasma treatment method |
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