JPS544073A - Cleaning method for semiconductor surface - Google Patents

Cleaning method for semiconductor surface

Info

Publication number
JPS544073A
JPS544073A JP6931277A JP6931277A JPS544073A JP S544073 A JPS544073 A JP S544073A JP 6931277 A JP6931277 A JP 6931277A JP 6931277 A JP6931277 A JP 6931277A JP S544073 A JPS544073 A JP S544073A
Authority
JP
Japan
Prior art keywords
semiconductor surface
cleaning method
semiconductor
damaging
eliminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6931277A
Other languages
Japanese (ja)
Inventor
Toshio Sugawa
Takeshi Konuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6931277A priority Critical patent/JPS544073A/en
Publication of JPS544073A publication Critical patent/JPS544073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To clean the semiconductor surface without damaging the performance as a semiconductor element, by eliminating the contaminated material only through plasma emission on the semiconductor surface.
COPYRIGHT: (C)1979,JPO&Japio
JP6931277A 1977-06-10 1977-06-10 Cleaning method for semiconductor surface Pending JPS544073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6931277A JPS544073A (en) 1977-06-10 1977-06-10 Cleaning method for semiconductor surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6931277A JPS544073A (en) 1977-06-10 1977-06-10 Cleaning method for semiconductor surface

Publications (1)

Publication Number Publication Date
JPS544073A true JPS544073A (en) 1979-01-12

Family

ID=13398909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6931277A Pending JPS544073A (en) 1977-06-10 1977-06-10 Cleaning method for semiconductor surface

Country Status (1)

Country Link
JP (1) JPS544073A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098626A (en) * 1983-11-02 1985-06-01 Oki Electric Ind Co Ltd Surface treating method of semiconductor layer
JP2003309105A (en) * 2002-04-15 2003-10-31 Matsushita Electric Ind Co Ltd Plasma treatment method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098626A (en) * 1983-11-02 1985-06-01 Oki Electric Ind Co Ltd Surface treating method of semiconductor layer
JPH0329173B2 (en) * 1983-11-02 1991-04-23 Oki Electric Ind Co Ltd
JP2003309105A (en) * 2002-04-15 2003-10-31 Matsushita Electric Ind Co Ltd Plasma treatment method

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