JPS5352071A - Baking unit of plate-shaped object - Google Patents
Baking unit of plate-shaped objectInfo
- Publication number
- JPS5352071A JPS5352071A JP12613876A JP12613876A JPS5352071A JP S5352071 A JPS5352071 A JP S5352071A JP 12613876 A JP12613876 A JP 12613876A JP 12613876 A JP12613876 A JP 12613876A JP S5352071 A JPS5352071 A JP S5352071A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped object
- baking unit
- baking
- magnetron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Printing Plates And Materials Therefor (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To shorten a processing time to improve work efficiency and prevent the dust from adhering by electron-baking the plate-shaped object with a magnetron.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12613876A JPS5352071A (en) | 1976-10-22 | 1976-10-22 | Baking unit of plate-shaped object |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12613876A JPS5352071A (en) | 1976-10-22 | 1976-10-22 | Baking unit of plate-shaped object |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP438278A Division JPS53144059A (en) | 1978-01-20 | 1978-01-20 | Device of generating microwave and device of heaing and treating article with generating device |
JP438478A Division JPS53144267A (en) | 1978-01-20 | 1978-01-20 | Baking method of photo resist component |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5352071A true JPS5352071A (en) | 1978-05-12 |
Family
ID=14927603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12613876A Pending JPS5352071A (en) | 1976-10-22 | 1976-10-22 | Baking unit of plate-shaped object |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5352071A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522832A (en) * | 1978-08-03 | 1980-02-18 | Matsushita Electric Ind Co Ltd | Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus |
JPS5821332A (en) * | 1981-05-15 | 1983-02-08 | ジ−・シ−・エ−・コ−ポレ−シヨン | Device for baking resist on semiconductor wafer |
JPS58199349A (en) * | 1982-05-17 | 1983-11-19 | Toshiba Corp | In-line device of photoetching |
JPS62111424A (en) * | 1985-10-28 | 1987-05-22 | Ushio Inc | Method for resist treatment |
JPS62111425A (en) * | 1985-10-28 | 1987-05-22 | Ushio Inc | Method for resist treatment |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4842842U (en) * | 1971-09-22 | 1973-06-01 | ||
JPS49124979A (en) * | 1973-04-02 | 1974-11-29 |
-
1976
- 1976-10-22 JP JP12613876A patent/JPS5352071A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4842842U (en) * | 1971-09-22 | 1973-06-01 | ||
JPS49124979A (en) * | 1973-04-02 | 1974-11-29 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522832A (en) * | 1978-08-03 | 1980-02-18 | Matsushita Electric Ind Co Ltd | Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus |
JPS5821332A (en) * | 1981-05-15 | 1983-02-08 | ジ−・シ−・エ−・コ−ポレ−シヨン | Device for baking resist on semiconductor wafer |
JPS58199349A (en) * | 1982-05-17 | 1983-11-19 | Toshiba Corp | In-line device of photoetching |
JPS62111424A (en) * | 1985-10-28 | 1987-05-22 | Ushio Inc | Method for resist treatment |
JPS62111425A (en) * | 1985-10-28 | 1987-05-22 | Ushio Inc | Method for resist treatment |
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