JPS5352071A - Baking unit of plate-shaped object - Google Patents

Baking unit of plate-shaped object

Info

Publication number
JPS5352071A
JPS5352071A JP12613876A JP12613876A JPS5352071A JP S5352071 A JPS5352071 A JP S5352071A JP 12613876 A JP12613876 A JP 12613876A JP 12613876 A JP12613876 A JP 12613876A JP S5352071 A JPS5352071 A JP S5352071A
Authority
JP
Japan
Prior art keywords
plate
shaped object
baking unit
baking
magnetron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12613876A
Other languages
Japanese (ja)
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12613876A priority Critical patent/JPS5352071A/en
Publication of JPS5352071A publication Critical patent/JPS5352071A/en
Pending legal-status Critical Current

Links

Landscapes

  • Printing Plates And Materials Therefor (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To shorten a processing time to improve work efficiency and prevent the dust from adhering by electron-baking the plate-shaped object with a magnetron.
COPYRIGHT: (C)1978,JPO&Japio
JP12613876A 1976-10-22 1976-10-22 Baking unit of plate-shaped object Pending JPS5352071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12613876A JPS5352071A (en) 1976-10-22 1976-10-22 Baking unit of plate-shaped object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12613876A JPS5352071A (en) 1976-10-22 1976-10-22 Baking unit of plate-shaped object

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP438278A Division JPS53144059A (en) 1978-01-20 1978-01-20 Device of generating microwave and device of heaing and treating article with generating device
JP438478A Division JPS53144267A (en) 1978-01-20 1978-01-20 Baking method of photo resist component

Publications (1)

Publication Number Publication Date
JPS5352071A true JPS5352071A (en) 1978-05-12

Family

ID=14927603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12613876A Pending JPS5352071A (en) 1976-10-22 1976-10-22 Baking unit of plate-shaped object

Country Status (1)

Country Link
JP (1) JPS5352071A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522832A (en) * 1978-08-03 1980-02-18 Matsushita Electric Ind Co Ltd Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus
JPS5821332A (en) * 1981-05-15 1983-02-08 ジ−・シ−・エ−・コ−ポレ−シヨン Device for baking resist on semiconductor wafer
JPS58199349A (en) * 1982-05-17 1983-11-19 Toshiba Corp In-line device of photoetching
JPS62111424A (en) * 1985-10-28 1987-05-22 Ushio Inc Method for resist treatment
JPS62111425A (en) * 1985-10-28 1987-05-22 Ushio Inc Method for resist treatment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842842U (en) * 1971-09-22 1973-06-01
JPS49124979A (en) * 1973-04-02 1974-11-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842842U (en) * 1971-09-22 1973-06-01
JPS49124979A (en) * 1973-04-02 1974-11-29

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522832A (en) * 1978-08-03 1980-02-18 Matsushita Electric Ind Co Ltd Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus
JPS5821332A (en) * 1981-05-15 1983-02-08 ジ−・シ−・エ−・コ−ポレ−シヨン Device for baking resist on semiconductor wafer
JPS58199349A (en) * 1982-05-17 1983-11-19 Toshiba Corp In-line device of photoetching
JPS62111424A (en) * 1985-10-28 1987-05-22 Ushio Inc Method for resist treatment
JPS62111425A (en) * 1985-10-28 1987-05-22 Ushio Inc Method for resist treatment

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