JPS53144267A - Baking method of photo resist component - Google Patents
Baking method of photo resist componentInfo
- Publication number
- JPS53144267A JPS53144267A JP438478A JP438478A JPS53144267A JP S53144267 A JPS53144267 A JP S53144267A JP 438478 A JP438478 A JP 438478A JP 438478 A JP438478 A JP 438478A JP S53144267 A JPS53144267 A JP S53144267A
- Authority
- JP
- Japan
- Prior art keywords
- photo resist
- resist component
- baking method
- baking
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To give the electronic baking to the photo resist component with use of the microwave, and thus to shorten the baking time.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP438478A JPS53144267A (en) | 1978-01-20 | 1978-01-20 | Baking method of photo resist component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP438478A JPS53144267A (en) | 1978-01-20 | 1978-01-20 | Baking method of photo resist component |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12613876A Division JPS5352071A (en) | 1976-10-22 | 1976-10-22 | Baking unit of plate-shaped object |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24399283A Division JPS6067323A (en) | 1983-12-26 | 1983-12-26 | Semiconductor wafer transfer mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53144267A true JPS53144267A (en) | 1978-12-15 |
Family
ID=11582856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP438478A Pending JPS53144267A (en) | 1978-01-20 | 1978-01-20 | Baking method of photo resist component |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53144267A (en) |
-
1978
- 1978-01-20 JP JP438478A patent/JPS53144267A/en active Pending
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