JPS49124979A - - Google Patents
Info
- Publication number
- JPS49124979A JPS49124979A JP3677973A JP3677973A JPS49124979A JP S49124979 A JPS49124979 A JP S49124979A JP 3677973 A JP3677973 A JP 3677973A JP 3677973 A JP3677973 A JP 3677973A JP S49124979 A JPS49124979 A JP S49124979A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3677973A JPS49124979A (en) | 1973-04-02 | 1973-04-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3677973A JPS49124979A (en) | 1973-04-02 | 1973-04-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS49124979A true JPS49124979A (en) | 1974-11-29 |
Family
ID=12479246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3677973A Pending JPS49124979A (en) | 1973-04-02 | 1973-04-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS49124979A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5352071A (en) * | 1976-10-22 | 1978-05-12 | Hitachi Ltd | Baking unit of plate-shaped object |
JPS5726433A (en) * | 1980-07-23 | 1982-02-12 | Hitachi Ltd | Bake of photoresist or the like and apparatus therefor |
JPS5752052A (en) * | 1980-09-12 | 1982-03-27 | Fujitsu Ltd | Heat treatment of photosensitive resin |
JPS58135643U (en) * | 1982-03-05 | 1983-09-12 | 松下電工株式会社 | Solar water heater water heater structure |
JPS6063893A (en) * | 1983-12-26 | 1985-04-12 | 株式会社日立製作所 | Article heater using magnetron |
US6011089A (en) * | 1995-06-07 | 2000-01-04 | Cytec Technology Corp. | Spray drying of polymer-containing dispersions, water-in-oil emulsions and water-in-oil microemulsions, and dry polymer products formed thereby |
JP2023082685A (en) * | 2021-12-02 | 2023-06-14 | セメス株式会社 | Apparatus for treating substrate and method for treating substrate |
-
1973
- 1973-04-02 JP JP3677973A patent/JPS49124979A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5352071A (en) * | 1976-10-22 | 1978-05-12 | Hitachi Ltd | Baking unit of plate-shaped object |
JPS5726433A (en) * | 1980-07-23 | 1982-02-12 | Hitachi Ltd | Bake of photoresist or the like and apparatus therefor |
JPS5752052A (en) * | 1980-09-12 | 1982-03-27 | Fujitsu Ltd | Heat treatment of photosensitive resin |
JPH0130138B2 (en) * | 1980-09-12 | 1989-06-16 | Fujitsu Ltd | |
JPS58135643U (en) * | 1982-03-05 | 1983-09-12 | 松下電工株式会社 | Solar water heater water heater structure |
JPS6063893A (en) * | 1983-12-26 | 1985-04-12 | 株式会社日立製作所 | Article heater using magnetron |
US6011089A (en) * | 1995-06-07 | 2000-01-04 | Cytec Technology Corp. | Spray drying of polymer-containing dispersions, water-in-oil emulsions and water-in-oil microemulsions, and dry polymer products formed thereby |
JP2023082685A (en) * | 2021-12-02 | 2023-06-14 | セメス株式会社 | Apparatus for treating substrate and method for treating substrate |