JPS5421274A - Chromium plate - Google Patents

Chromium plate

Info

Publication number
JPS5421274A
JPS5421274A JP8683977A JP8683977A JPS5421274A JP S5421274 A JPS5421274 A JP S5421274A JP 8683977 A JP8683977 A JP 8683977A JP 8683977 A JP8683977 A JP 8683977A JP S5421274 A JPS5421274 A JP S5421274A
Authority
JP
Japan
Prior art keywords
chromium plate
chromium
substrate
increasing
group element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8683977A
Other languages
Japanese (ja)
Inventor
Yukimichi Kanedaki
Kyusaku Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8683977A priority Critical patent/JPS5421274A/en
Publication of JPS5421274A publication Critical patent/JPS5421274A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make good dimension accuracy, by increasing the etching speed in gas plasma etching, by adding fine amount of V group element such as N, P, As, Sb, Bi to the chromium or chromium oxide coated on a substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP8683977A 1977-07-19 1977-07-19 Chromium plate Pending JPS5421274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8683977A JPS5421274A (en) 1977-07-19 1977-07-19 Chromium plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8683977A JPS5421274A (en) 1977-07-19 1977-07-19 Chromium plate

Publications (1)

Publication Number Publication Date
JPS5421274A true JPS5421274A (en) 1979-02-17

Family

ID=13897971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8683977A Pending JPS5421274A (en) 1977-07-19 1977-07-19 Chromium plate

Country Status (1)

Country Link
JP (1) JPS5421274A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57104141A (en) * 1980-12-22 1982-06-29 Dainippon Printing Co Ltd Photomask and photomask substrate
JPS5977337A (en) * 1982-10-25 1984-05-02 Nippon Steel Chem Co Ltd Friction testing device
WO2006006540A1 (en) * 2004-07-09 2006-01-19 Hoya Corporation Photomask blank, photomask manufacturing method and semiconductor device manufacturing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57104141A (en) * 1980-12-22 1982-06-29 Dainippon Printing Co Ltd Photomask and photomask substrate
JPS6146821B2 (en) * 1980-12-22 1986-10-16 Dainippon Printing Co Ltd
JPS5977337A (en) * 1982-10-25 1984-05-02 Nippon Steel Chem Co Ltd Friction testing device
JPS6334419B2 (en) * 1982-10-25 1988-07-11 Shinnitsutetsu Kagaku Kk
WO2006006540A1 (en) * 2004-07-09 2006-01-19 Hoya Corporation Photomask blank, photomask manufacturing method and semiconductor device manufacturing method

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