JPS52100396A - Vacuum evaporation of cerium oxide thin film - Google Patents

Vacuum evaporation of cerium oxide thin film

Info

Publication number
JPS52100396A
JPS52100396A JP1708076A JP1708076A JPS52100396A JP S52100396 A JPS52100396 A JP S52100396A JP 1708076 A JP1708076 A JP 1708076A JP 1708076 A JP1708076 A JP 1708076A JP S52100396 A JPS52100396 A JP S52100396A
Authority
JP
Japan
Prior art keywords
cerium oxide
vacuum evaporation
thin film
oxide thin
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1708076A
Other languages
Japanese (ja)
Other versions
JPS585849B2 (en
Inventor
Kiyoshi Watanabe
Kazuo Sunahara
Tsutomu Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51017080A priority Critical patent/JPS585849B2/en
Priority to DE19772706896 priority patent/DE2706896C3/en
Priority to NL7701757A priority patent/NL169758C/en
Priority to GB697177A priority patent/GB1563964A/en
Priority to FR7704857A priority patent/FR2341668A1/en
Publication of JPS52100396A publication Critical patent/JPS52100396A/en
Priority to US05/910,344 priority patent/US4242373A/en
Publication of JPS585849B2 publication Critical patent/JPS585849B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233—Manufacture of photoelectric screens or charge-storage screens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE: To vacuum evaproate a cerium oxide thin film without forming spot extraneous matter on a substrate for vacuum evaporation by regulating the grain size of cerium oxide and controlling vacuum evaporation speed.
COPYRIGHT: (C)1977,JPO&Japio
JP51017080A 1976-02-20 1976-02-20 Method for depositing cerium oxide thin film Expired JPS585849B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP51017080A JPS585849B2 (en) 1976-02-20 1976-02-20 Method for depositing cerium oxide thin film
DE19772706896 DE2706896C3 (en) 1976-02-20 1977-02-17 Process for the vapor deposition of a thin layer of cerium oxide
NL7701757A NL169758C (en) 1976-02-20 1977-02-18 A method for depositing a thin cerium oxide film from the vapor phase as well as an image recording tube containing a film thus deposited.
GB697177A GB1563964A (en) 1976-02-20 1977-02-18 Method for vapour depositing a cerium oxide film
FR7704857A FR2341668A1 (en) 1976-02-20 1977-02-18 PROCESS FOR DEPOSITING A CERIUM OXIDE FILM IN VAPOR PHASE CONSTITUTING A BLOCKING LAYER IN THE PHOTOSENSITIVE LAYER OF AN IMAGE ANALYZER TUBE
US05/910,344 US4242373A (en) 1976-02-20 1978-05-30 Method for vapor depositing a cerium oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51017080A JPS585849B2 (en) 1976-02-20 1976-02-20 Method for depositing cerium oxide thin film

Publications (2)

Publication Number Publication Date
JPS52100396A true JPS52100396A (en) 1977-08-23
JPS585849B2 JPS585849B2 (en) 1983-02-02

Family

ID=11933988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51017080A Expired JPS585849B2 (en) 1976-02-20 1976-02-20 Method for depositing cerium oxide thin film

Country Status (5)

Country Link
JP (1) JPS585849B2 (en)
DE (1) DE2706896C3 (en)
FR (1) FR2341668A1 (en)
GB (1) GB1563964A (en)
NL (1) NL169758C (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE171732T1 (en) * 1992-07-02 1998-10-15 Balzers Hochvakuum METHOD FOR PRODUCING A METAL OXIDE LAYER, VACUUM TREATMENT SYSTEM THEREFOR AND PART COATED WITH AT LEAST ONE METAL OXIDE LAYER

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945998A (en) * 1972-09-11 1974-05-02
JPS5039467A (en) * 1973-07-02 1975-04-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945998A (en) * 1972-09-11 1974-05-02
JPS5039467A (en) * 1973-07-02 1975-04-11

Also Published As

Publication number Publication date
FR2341668A1 (en) 1977-09-16
DE2706896B2 (en) 1979-05-31
NL7701757A (en) 1977-08-23
DE2706896A1 (en) 1977-08-25
NL169758B (en) 1982-03-16
FR2341668B1 (en) 1980-02-01
DE2706896C3 (en) 1980-01-17
NL169758C (en) 1982-08-16
GB1563964A (en) 1980-04-02
JPS585849B2 (en) 1983-02-02

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