JPS53114382A - Sample differential equipment of electric distortion driving type - Google Patents

Sample differential equipment of electric distortion driving type

Info

Publication number
JPS53114382A
JPS53114382A JP2797577A JP2797577A JPS53114382A JP S53114382 A JPS53114382 A JP S53114382A JP 2797577 A JP2797577 A JP 2797577A JP 2797577 A JP2797577 A JP 2797577A JP S53114382 A JPS53114382 A JP S53114382A
Authority
JP
Japan
Prior art keywords
driving type
electric distortion
sample differential
differential equipment
distortion driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2797577A
Other languages
Japanese (ja)
Other versions
JPS6123675B2 (en
Inventor
Kiyoshi Ishikawa
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2797577A priority Critical patent/JPS53114382A/en
Publication of JPS53114382A publication Critical patent/JPS53114382A/en
Publication of JPS6123675B2 publication Critical patent/JPS6123675B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To move an object at high precision by controlling the moving speed of a plane substrate through the combination of freely-selected operation times of an electrostatic clutch.
COPYRIGHT: (C)1978,JPO&Japio
JP2797577A 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type Granted JPS53114382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2797577A JPS53114382A (en) 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2797577A JPS53114382A (en) 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type

Publications (2)

Publication Number Publication Date
JPS53114382A true JPS53114382A (en) 1978-10-05
JPS6123675B2 JPS6123675B2 (en) 1986-06-06

Family

ID=12235862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2797577A Granted JPS53114382A (en) 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type

Country Status (1)

Country Link
JP (1) JPS53114382A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598018A (en) * 1982-07-07 1984-01-17 Hitachi Ltd Fine shifting device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171782U (en) * 1986-04-18 1987-10-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598018A (en) * 1982-07-07 1984-01-17 Hitachi Ltd Fine shifting device

Also Published As

Publication number Publication date
JPS6123675B2 (en) 1986-06-06

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