JPS53114382A - Sample differential equipment of electric distortion driving type - Google Patents
Sample differential equipment of electric distortion driving typeInfo
- Publication number
- JPS53114382A JPS53114382A JP2797577A JP2797577A JPS53114382A JP S53114382 A JPS53114382 A JP S53114382A JP 2797577 A JP2797577 A JP 2797577A JP 2797577 A JP2797577 A JP 2797577A JP S53114382 A JPS53114382 A JP S53114382A
- Authority
- JP
- Japan
- Prior art keywords
- driving type
- electric distortion
- sample differential
- differential equipment
- distortion driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To move an object at high precision by controlling the moving speed of a plane substrate through the combination of freely-selected operation times of an electrostatic clutch.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2797577A JPS53114382A (en) | 1977-03-16 | 1977-03-16 | Sample differential equipment of electric distortion driving type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2797577A JPS53114382A (en) | 1977-03-16 | 1977-03-16 | Sample differential equipment of electric distortion driving type |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53114382A true JPS53114382A (en) | 1978-10-05 |
JPS6123675B2 JPS6123675B2 (en) | 1986-06-06 |
Family
ID=12235862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2797577A Granted JPS53114382A (en) | 1977-03-16 | 1977-03-16 | Sample differential equipment of electric distortion driving type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53114382A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS598018A (en) * | 1982-07-07 | 1984-01-17 | Hitachi Ltd | Fine shifting device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62171782U (en) * | 1986-04-18 | 1987-10-31 |
-
1977
- 1977-03-16 JP JP2797577A patent/JPS53114382A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS598018A (en) * | 1982-07-07 | 1984-01-17 | Hitachi Ltd | Fine shifting device |
Also Published As
Publication number | Publication date |
---|---|
JPS6123675B2 (en) | 1986-06-06 |
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