JPS6123675B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample moving device that moves the position of an object with high precision.

Firstly, the special public patent application 1977-12497, and the special patent application 1977-60017.
We have provided a new sample moving device that can move the position of an object with extremely high precision.
The principle is that it utilizes the expansion and contraction effect of a member with an inverse piezoelectric effect that occurs when a voltage is applied to the member, and the attraction effect of electrostatic or electromagnetic clutches attached to both end faces of the member. This device is characterized in that it allows a desired moving movement to be performed.

The structure and operating principle will be outlined below with reference to FIG.

1 is a cylindrical body member made of a material exhibiting an inverse piezoelectric effect, 2 and 3 are leg members fixed at both ends, and each of the leg members 2 and 3 is a slider member 6 made of a semiconductive dielectric material. , 7 on the base 8. Furthermore, the slider members 6, 7 are fixed to the leg members 2, 3 and form an electrostatic clutch with a base 8 of electrically conductive material. In this example, an electrostatic clutch type is shown, but if the magnetic effect is not a problem, a slider member made of a magnetic material is used, a conductor is wound around the slider member, and a current is passed through the slider member. An electromagnetic clutch type that utilizes electromagnetic force obtained by magnetizing the mover member may also be used. The same applies to the embodiments of the present invention.

Further, the slider member 6 and the base 8 are electrically connected through a switch S ₁ and a power source E ₁ , and the slider member 7 and the base 8 are electrically connected through a switch S ₂ and a power source E ₁ . There is. Electrodes for applying electricity are attached to the inside and outside of the body member 1, and a switch S ₃ is connected between these electrodes.
Power supply E ₃ is connected through.

A sample stage 9 is fixed to the upper part of the leg member 3 with fixing screws 10. When a voltage is applied to the electrodes of the body member 1, the insulators 4 and 5 are connected to the leg members 2 and 5.
In addition to electrically insulating the body member 1 and the leg members 2 and 3 so as not to be transmitted to the body member 3, the member also serves to bond the body member 1 and the leg members 2 and 3 together.

The operating principle of this device is to utilize step movement obtained by alternately controlling the voltage application to the body member 1 and slider members fixed at both ends. Now, assuming that the state of voltage application to the body member and each slider member is 1, and the state of no voltage being applied is 0, when moving the sample stage 9 to the left, each slider member is Just apply a voltage to that part. The detailed operation is omitted because it is described in the above-mentioned known example and prior application.

The moving speed at this time can be adjusted arbitrarily by adjusting the voltage applied to the body member 1, or by keeping the voltage constant and increasing or decreasing the number of times _S3 is switched.

According to the authors' experimental results, the maximum voltage that can be applied to the body member 1 is about 2000V, and at this time the voltage that can be applied to the body member 1 is
The amount of elongation was approximately 3 μm. Therefore, by applying voltage to each part in the order of states 1 to 7 shown in FIG. 2, the test stand can be moved 3 μm to the right. The maximum speed at this time was about 1 mm/Sec. This is body member 1
and the frequency response speed of the slider member.

It has been found that the moving device having the above-mentioned configuration can be used without any problem when it comes to moving a minute part of a sample.

However, when the sample to be observed becomes large and the movement range becomes large, it takes a long time to move the entire field of view of the sample.
A demand arises to increase the moving speed of the sample.

The present invention is intended to solve the above-mentioned problems.

The purpose is to increase the sample feeding speed in an electrostrictive sample fine movement device.

Hereinafter, the present invention will be explained in detail with reference to Examples.

FIG. 3 shows the basic configuration of the present invention. The main difference from the conventional device is that the leg members 2,
Slider members 11 and 12 and power supplies E ₄ and E ₅ for applying voltage to these slider members 11 and 12 are also added to the upper surface of 3, and the sample stage 9 is not fixed to the leg member 3 with screws. , simply the sample stage 9 is the slider member 1.
In this structure, the slider members 6 and 7 are placed on the base 8 of the conductive material so that they can be placed in smooth surface contact with the base 8 of the conductive material. 12 needs to be in smooth surface contact with the lower surface of the sample stage 9.

In the apparatus having this configuration, the operating state of each part during sample movement is shown in FIG. 4. As in FIG. 2, the voltage application state is 1 and the no voltage application state is 0.

Comparing this result with FIG. 2, the operation state for moving the sample is 7 in both FIGS. 2 and 4, and the unit step operation is completed.

However, in the prior art (see FIGS. 1 and 2), when moving from the operating state 5 shown in FIG. 2 to the operating state 6, the sample stage 9 is fixed by the slider member 7, and the body member 1 The amount of contraction when it contracts does not contribute to the movement of the sample stage 9, but simply,
The slider member 6 is simply pulled back to the right in FIG. 1 while sliding on the upper surface of the base 8.

In comparison, when moving from operating state 5 to operating state 6 in the present invention (see FIGS. 3 and 4),
That is, even when the body member 1 is contracted, the slider member 7 is fixed to the base 8, and the slider member 11 is fixed to the base 8.
is fixed to the sample stand 9, so the sample stand 9
can contribute to the movement of

This difference between the two results in doubling the moving speed of the sample stage under the same voltage application conditions, and the effect of the present invention is remarkable.

Also, as shown in Figure 5, S ₄ is turned off during the entire period S ₅
If it is turned off during the entire period, the moving speed of the sample stage will be the first
It will be the same as the case shown in the figure. Therefore, it is also possible to adjust the moving speed by electrical switching.

As mentioned above, by arranging a plurality of slider members at both ends of the body member and arbitrarily selecting the timing at which each slider member operates, the moving speed of the parallel plate can be easily changed. Yes, the effects are remarkable.

Although only the movement in the X-axis direction is shown in Fig. 4, if you also want to add movement in the Y-axis direction,
Furthermore, on the sample stage 9, a device having the same structure as that shown in FIG. 4 is mounted in a direction perpendicular to the
If they are operated alternately, they can be moved in any direction on the XY plane.

[Brief explanation of the drawing]

Fig. 1 is a structural diagram of a conventional electrostrictive drive type sample fine movement device, Fig. 2 is a diagram showing the operating state of the device shown in Fig. 1, and Fig. 3 is a diagram of the electrostriction drive type sample movement device of the present invention. The structural diagrams, FIGS. 4 and 5, are diagrams showing operating states for driving the device shown in FIG. 3.

Claims (1)

[Claims] 1. A trunk member that is expandable and contractible due to reverse voltage effect;
a drive unit including first and second leg members fixed to both ends of the body member; (b) a base having a flat surface on which the drive unit is movably mounted; and (c) a base mounted on the drive unit. In an electrostrictive drive type sample fine movement device having a sample stage, the surfaces of the first and second leg members that contact the base are slidable on the base and are selectively selectively moved, respectively, by electrostatic attraction. is provided with first and second slider members restrained by the base, and the sample stand slides on surfaces of the first and second leg members that contact the sample stand, respectively, Further, third and fourth slider members are provided that selectively restrain the sample stage individually and selectively by electrostatic attraction, and the slider members are arranged to control the expansion and contraction of the body member and the first, second, third, and fourth slider members. An electrostrictive drive type sample fine movement device that moves the sample stage by selecting a period of restraint of a slider member.