JPS5421258A - Separation method for semiconductor element - Google Patents

Separation method for semiconductor element

Info

Publication number
JPS5421258A
JPS5421258A JP8698977A JP8698977A JPS5421258A JP S5421258 A JPS5421258 A JP S5421258A JP 8698977 A JP8698977 A JP 8698977A JP 8698977 A JP8698977 A JP 8698977A JP S5421258 A JPS5421258 A JP S5421258A
Authority
JP
Japan
Prior art keywords
semiconductor element
separation method
wafer
fallure
notches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8698977A
Other languages
Japanese (ja)
Inventor
Jiro Kakehi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP8698977A priority Critical patent/JPS5421258A/en
Publication of JPS5421258A publication Critical patent/JPS5421258A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To efficiently separate elements while avoiding short circuit fallure, by giving notches to a wafer on which a number of semiconductor elements are formed to the extent that each element is not separated from one side ofthe wafer and by cutting the remainder by use of a laser from another side.
COPYRIGHT: (C)1979,JPO&Japio
JP8698977A 1977-07-19 1977-07-19 Separation method for semiconductor element Pending JPS5421258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8698977A JPS5421258A (en) 1977-07-19 1977-07-19 Separation method for semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8698977A JPS5421258A (en) 1977-07-19 1977-07-19 Separation method for semiconductor element

Publications (1)

Publication Number Publication Date
JPS5421258A true JPS5421258A (en) 1979-02-17

Family

ID=13902265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8698977A Pending JPS5421258A (en) 1977-07-19 1977-07-19 Separation method for semiconductor element

Country Status (1)

Country Link
JP (1) JPS5421258A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010133689A (en) * 2008-12-04 2010-06-17 Ind Technol Res Inst Invertor energy-saving temperature control device for refrigerating device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4858771A (en) * 1971-11-22 1973-08-17
JPS4939150A (en) * 1972-08-23 1974-04-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4858771A (en) * 1971-11-22 1973-08-17
JPS4939150A (en) * 1972-08-23 1974-04-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010133689A (en) * 2008-12-04 2010-06-17 Ind Technol Res Inst Invertor energy-saving temperature control device for refrigerating device

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