JPS5432968A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5432968A JPS5432968A JP9973877A JP9973877A JPS5432968A JP S5432968 A JPS5432968 A JP S5432968A JP 9973877 A JP9973877 A JP 9973877A JP 9973877 A JP9973877 A JP 9973877A JP S5432968 A JPS5432968 A JP S5432968A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- substrate
- mesa
- curvature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Dicing (AREA)
Abstract
PURPOSE: To make it possible to manufacture a semiconductor device at high yield without any curvature of the substrate, by forming electrodes on both surfaces of the semiconductor substrate by separating the substrate, formed in a mesa shape, along the mesa-shaped bottom part.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9973877A JPS5432968A (en) | 1977-08-19 | 1977-08-19 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9973877A JPS5432968A (en) | 1977-08-19 | 1977-08-19 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5432968A true JPS5432968A (en) | 1979-03-10 |
JPS579701B2 JPS579701B2 (en) | 1982-02-23 |
Family
ID=14255361
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9973877A Granted JPS5432968A (en) | 1977-08-19 | 1977-08-19 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432968A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694167A (en) * | 1979-12-28 | 1981-07-30 | Kawasaki Heavy Ind Ltd | Method of utilizing cold heat |
US5279704A (en) * | 1991-04-23 | 1994-01-18 | Honda Giken Kogyo Kabushiki Kaisha | Method of fabricating semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4829820U (en) * | 1971-08-07 | 1973-04-12 |
-
1977
- 1977-08-19 JP JP9973877A patent/JPS5432968A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4829820U (en) * | 1971-08-07 | 1973-04-12 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694167A (en) * | 1979-12-28 | 1981-07-30 | Kawasaki Heavy Ind Ltd | Method of utilizing cold heat |
US5279704A (en) * | 1991-04-23 | 1994-01-18 | Honda Giken Kogyo Kabushiki Kaisha | Method of fabricating semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS579701B2 (en) | 1982-02-23 |
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