JPS5415687A - Manufacture of semiconductor optical device - Google Patents
Manufacture of semiconductor optical deviceInfo
- Publication number
- JPS5415687A JPS5415687A JP7983178A JP7983178A JPS5415687A JP S5415687 A JPS5415687 A JP S5415687A JP 7983178 A JP7983178 A JP 7983178A JP 7983178 A JP7983178 A JP 7983178A JP S5415687 A JPS5415687 A JP S5415687A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- optical device
- semiconductor optical
- gas
- gacl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To manufacture a compound semiconductor optical device featuring a high crystalline performance through a simple way, by making use of the concave or convex artificial buried layer formed on the substrate surface in an atmosphere of H2 gas with GaCl3 gas mixed in.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7983178A JPS5415687A (en) | 1978-07-03 | 1978-07-03 | Manufacture of semiconductor optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7983178A JPS5415687A (en) | 1978-07-03 | 1978-07-03 | Manufacture of semiconductor optical device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6626675A Division JPS51142281A (en) | 1975-06-02 | 1975-06-02 | Method of manufacturing light emitting diode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5415687A true JPS5415687A (en) | 1979-02-05 |
JPS5412795B2 JPS5412795B2 (en) | 1979-05-25 |
Family
ID=13701144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7983178A Granted JPS5415687A (en) | 1978-07-03 | 1978-07-03 | Manufacture of semiconductor optical device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5415687A (en) |
-
1978
- 1978-07-03 JP JP7983178A patent/JPS5415687A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5412795B2 (en) | 1979-05-25 |
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