JPS54152463A - Manufacture of semiconductor element - Google Patents
Manufacture of semiconductor elementInfo
- Publication number
- JPS54152463A JPS54152463A JP6147978A JP6147978A JPS54152463A JP S54152463 A JPS54152463 A JP S54152463A JP 6147978 A JP6147978 A JP 6147978A JP 6147978 A JP6147978 A JP 6147978A JP S54152463 A JPS54152463 A JP S54152463A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- adhesives
- substrate
- metal
- metal plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To simplify extremely a check on the appearance of an element in an incomplete shape at the circumference of a semicondutor wafer, by coating the element with a substance which is not dipped during a removing process for adhesives fixing to a support substrate.
CONSTITUTION: Wafer 5 is N-type Si wafer 1 which has P-type region 2 on the entire surface at its one side and metal electrodes 3 and 4 on both its sides. Next, metal layer 4 is bonded to glass substrate 7 via adhesives 6. Then, metal layer 3 is coated with adhesives 8 and several metal plates 9 are bonded to an adhesive vinyl sheet, etc., after metal plate 9 is stuck to wafer 5, the sheet is peeled off. Next, parts which are not covered with metal plates 9 of wafer 5 are removed by cutting. Then, only element 10a under metal plates 9a stuck projecting partially from the circumference of wafer 5 is covered with a substance which is not dipped in a solution for the removal of adhesives 6 and 8. In consequence, defective element 10a is left on substrate 7 after element 10 is peeled off from substrate 7, so that there will be no need to makes a check on the total number of elements after the peeling process.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6147978A JPS54152463A (en) | 1978-05-22 | 1978-05-22 | Manufacture of semiconductor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6147978A JPS54152463A (en) | 1978-05-22 | 1978-05-22 | Manufacture of semiconductor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54152463A true JPS54152463A (en) | 1979-11-30 |
Family
ID=13172239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6147978A Pending JPS54152463A (en) | 1978-05-22 | 1978-05-22 | Manufacture of semiconductor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54152463A (en) |
-
1978
- 1978-05-22 JP JP6147978A patent/JPS54152463A/en active Pending
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