JPS54141699A - Chemically responding element - Google Patents
Chemically responding elementInfo
- Publication number
- JPS54141699A JPS54141699A JP4960278A JP4960278A JPS54141699A JP S54141699 A JPS54141699 A JP S54141699A JP 4960278 A JP4960278 A JP 4960278A JP 4960278 A JP4960278 A JP 4960278A JP S54141699 A JPS54141699 A JP S54141699A
- Authority
- JP
- Japan
- Prior art keywords
- source
- layer
- type
- electrode
- bias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000006378 damage Effects 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000012488 sample solution Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4960278A JPS54141699A (en) | 1978-04-26 | 1978-04-26 | Chemically responding element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4960278A JPS54141699A (en) | 1978-04-26 | 1978-04-26 | Chemically responding element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54141699A true JPS54141699A (en) | 1979-11-05 |
| JPS6113180B2 JPS6113180B2 (enrdf_load_stackoverflow) | 1986-04-11 |
Family
ID=12835774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4960278A Granted JPS54141699A (en) | 1978-04-26 | 1978-04-26 | Chemically responding element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54141699A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168043A (ja) * | 1984-02-10 | 1985-08-31 | Sharp Corp | Fet型センサ |
| JPS60242354A (ja) * | 1984-05-16 | 1985-12-02 | Sharp Corp | Fet型センサ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6358098A (ja) * | 1986-08-29 | 1988-03-12 | Suupaa Hiitoponpu Energ Shiyuuseki Syst Gijutsu Kenkyu Kumiai | プレ−トフイン形蒸発器 |
-
1978
- 1978-04-26 JP JP4960278A patent/JPS54141699A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168043A (ja) * | 1984-02-10 | 1985-08-31 | Sharp Corp | Fet型センサ |
| JPS60242354A (ja) * | 1984-05-16 | 1985-12-02 | Sharp Corp | Fet型センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6113180B2 (enrdf_load_stackoverflow) | 1986-04-11 |
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