JPS54139494A - Forming mehtod of multi-layer wiring - Google Patents

Forming mehtod of multi-layer wiring

Info

Publication number
JPS54139494A
JPS54139494A JP4652878A JP4652878A JPS54139494A JP S54139494 A JPS54139494 A JP S54139494A JP 4652878 A JP4652878 A JP 4652878A JP 4652878 A JP4652878 A JP 4652878A JP S54139494 A JPS54139494 A JP S54139494A
Authority
JP
Japan
Prior art keywords
film
wiring
layer
coated
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4652878A
Other languages
English (en)
Inventor
Yasunobu Osa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4652878A priority Critical patent/JPS54139494A/ja
Publication of JPS54139494A publication Critical patent/JPS54139494A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4652878A 1978-04-21 1978-04-21 Forming mehtod of multi-layer wiring Pending JPS54139494A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4652878A JPS54139494A (en) 1978-04-21 1978-04-21 Forming mehtod of multi-layer wiring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4652878A JPS54139494A (en) 1978-04-21 1978-04-21 Forming mehtod of multi-layer wiring

Publications (1)

Publication Number Publication Date
JPS54139494A true JPS54139494A (en) 1979-10-29

Family

ID=12749773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4652878A Pending JPS54139494A (en) 1978-04-21 1978-04-21 Forming mehtod of multi-layer wiring

Country Status (1)

Country Link
JP (1) JPS54139494A (ja)

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