JPS54136224A - Target electrode for color pick up tube and its manufacture - Google Patents

Target electrode for color pick up tube and its manufacture

Info

Publication number
JPS54136224A
JPS54136224A JP4470478A JP4470478A JPS54136224A JP S54136224 A JPS54136224 A JP S54136224A JP 4470478 A JP4470478 A JP 4470478A JP 4470478 A JP4470478 A JP 4470478A JP S54136224 A JPS54136224 A JP S54136224A
Authority
JP
Japan
Prior art keywords
conductive film
sno
low temperature
transparent conductive
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4470478A
Other languages
Japanese (ja)
Inventor
Tadashi Hasegawa
Koichi Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP4470478A priority Critical patent/JPS54136224A/en
Publication of JPS54136224A publication Critical patent/JPS54136224A/en
Pending legal-status Critical Current

Links

Landscapes

  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)

Abstract

PURPOSE: To simplify the manufacturing process and to prevent the occurrence of defective elements due to mistake of the front and back identification, by forming the transparent conductive film inside the glass thin plate bonded on the inner surface of the color filter through the evaporation of the sintering body of In2O3 and SnO2 with low temperature sputtering method.
CONSTITUTION: The transparent conductive film 4 of metallic oxide of In2O3 and SnO2 is formed with evaporation by low temperature sputtering method inside the glass thin plate 3 coating via the color separation color filter 2 on the inner surface of the face plate 1. Further, on he inside surface of the transparent conductive film 4, the photo conductive film 5 is placed, and the sealing indium ring 6, glass bulb 7 and the metal ring 8 are fixed. The specific gravity ratio of SnO2 in the metal oxide at this process is taken as 2 to 10%. Further, magnetron sputter method is used as low temperature sputter method.
COPYRIGHT: (C)1979,JPO&Japio
JP4470478A 1978-04-14 1978-04-14 Target electrode for color pick up tube and its manufacture Pending JPS54136224A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4470478A JPS54136224A (en) 1978-04-14 1978-04-14 Target electrode for color pick up tube and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4470478A JPS54136224A (en) 1978-04-14 1978-04-14 Target electrode for color pick up tube and its manufacture

Publications (1)

Publication Number Publication Date
JPS54136224A true JPS54136224A (en) 1979-10-23

Family

ID=12698795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4470478A Pending JPS54136224A (en) 1978-04-14 1978-04-14 Target electrode for color pick up tube and its manufacture

Country Status (1)

Country Link
JP (1) JPS54136224A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03295114A (en) * 1990-04-13 1991-12-26 Sumitomo Metal Mining Co Ltd Target for manufacturing transparent conductive film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5024038A (en) * 1973-06-29 1975-03-14
JPS52111892A (en) * 1976-03-18 1977-09-19 Kobayashi Rigaku Kenkiyuushiyo Process for forming transparent electrode

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5024038A (en) * 1973-06-29 1975-03-14
JPS52111892A (en) * 1976-03-18 1977-09-19 Kobayashi Rigaku Kenkiyuushiyo Process for forming transparent electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03295114A (en) * 1990-04-13 1991-12-26 Sumitomo Metal Mining Co Ltd Target for manufacturing transparent conductive film

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