JPS57208033A - Target electrode for color image pickup tube and its manufacture - Google Patents

Target electrode for color image pickup tube and its manufacture

Info

Publication number
JPS57208033A
JPS57208033A JP9252881A JP9252881A JPS57208033A JP S57208033 A JPS57208033 A JP S57208033A JP 9252881 A JP9252881 A JP 9252881A JP 9252881 A JP9252881 A JP 9252881A JP S57208033 A JPS57208033 A JP S57208033A
Authority
JP
Japan
Prior art keywords
metal
glass plate
thin glass
alloy consisting
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9252881A
Other languages
Japanese (ja)
Inventor
Hiroshi Motoyama
Tsuneichi Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9252881A priority Critical patent/JPS57208033A/en
Publication of JPS57208033A publication Critical patent/JPS57208033A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233Manufacture of photoelectric screens or charge-storage screens

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

PURPOSE:To enable a homogenous smooth target surface to be constantly used, prevent any unusual discharge, prevent any scattering of huge particles, and increase the yield of a target electrode by using a pure metal consisting of an alloy consisting of either In metal alone or In metal and Sn metal as an evaporation source. CONSTITUTION:In this invertion, a transparent conductive film of a metal oxide is formed by making an alloy consisting of either In metal along or In metal and Sn metal to undergo reaction at a relatively low temperature, in an atmosphere containing oxygen. In short, after a thin glass plate is stuck on the inner wall of a color-separation color filter with an adhesive, the thin glass plate is heated within the temperature range of 70-130 deg.C, and an alloy consisting of either In metal alone or In metal and Sn metal in subjected to a vapor deposition in an atmosohere containing oxygen by a magnetron sputtering method so as to form a transparent conductive film of a metal oxide on the inner wall of the thin glass plate. It is preferred that the metal-oxide film is formed at a speed of 1.5Angstrom /sec. by carrying out the above vapordeposition treatment for about 2min. In addition, the content of the above Sn metal is preferably adjusted to 0-10% of the above alloy.
JP9252881A 1981-06-16 1981-06-16 Target electrode for color image pickup tube and its manufacture Pending JPS57208033A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9252881A JPS57208033A (en) 1981-06-16 1981-06-16 Target electrode for color image pickup tube and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9252881A JPS57208033A (en) 1981-06-16 1981-06-16 Target electrode for color image pickup tube and its manufacture

Publications (1)

Publication Number Publication Date
JPS57208033A true JPS57208033A (en) 1982-12-21

Family

ID=14056842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9252881A Pending JPS57208033A (en) 1981-06-16 1981-06-16 Target electrode for color image pickup tube and its manufacture

Country Status (1)

Country Link
JP (1) JPS57208033A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011100584A (en) * 2009-11-04 2011-05-19 Nippon Hoso Kyokai <Nhk> Photoconductive element and imaging device using this, and manufacturing method of substrate with conductive film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011100584A (en) * 2009-11-04 2011-05-19 Nippon Hoso Kyokai <Nhk> Photoconductive element and imaging device using this, and manufacturing method of substrate with conductive film

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