JPS54133079A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS54133079A
JPS54133079A JP4083678A JP4083678A JPS54133079A JP S54133079 A JPS54133079 A JP S54133079A JP 4083678 A JP4083678 A JP 4083678A JP 4083678 A JP4083678 A JP 4083678A JP S54133079 A JPS54133079 A JP S54133079A
Authority
JP
Japan
Prior art keywords
heat treatment
gas
amount
flat band
band voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4083678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148791B2 (Direct
Inventor
Hiroshi Tokunaga
Nobuo Toyokura
Toru Shinoki
Hajime Ishikawa
Fumihiko Yanagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
NTT Inc
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP4083678A priority Critical patent/JPS54133079A/ja
Publication of JPS54133079A publication Critical patent/JPS54133079A/ja
Publication of JPS6148791B2 publication Critical patent/JPS6148791B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP4083678A 1978-04-07 1978-04-07 Manufacture for semiconductor device Granted JPS54133079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4083678A JPS54133079A (en) 1978-04-07 1978-04-07 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4083678A JPS54133079A (en) 1978-04-07 1978-04-07 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS54133079A true JPS54133079A (en) 1979-10-16
JPS6148791B2 JPS6148791B2 (Direct) 1986-10-25

Family

ID=12591705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4083678A Granted JPS54133079A (en) 1978-04-07 1978-04-07 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS54133079A (Direct)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759381A (en) * 1980-09-29 1982-04-09 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semicondutor device
JPS5885534A (ja) * 1981-11-18 1983-05-21 Komatsu Denshi Kinzoku Kk 半導体シリコン基板の製造法
JPH04218921A (ja) * 1990-07-05 1992-08-10 Toshiba Corp 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759381A (en) * 1980-09-29 1982-04-09 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semicondutor device
JPS5885534A (ja) * 1981-11-18 1983-05-21 Komatsu Denshi Kinzoku Kk 半導体シリコン基板の製造法
JPH04218921A (ja) * 1990-07-05 1992-08-10 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6148791B2 (Direct) 1986-10-25

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