JPS51150281A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS51150281A JPS51150281A JP7366675A JP7366675A JPS51150281A JP S51150281 A JPS51150281 A JP S51150281A JP 7366675 A JP7366675 A JP 7366675A JP 7366675 A JP7366675 A JP 7366675A JP S51150281 A JPS51150281 A JP S51150281A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- electrodes
- reproductivity
- tructure
- mosfet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To realize compactness and high-speed manufacturing of a MOSFET by constituting a gate electrodes tructure as a complex structure of polycrystal silicon and high fusion point metal, by improving on the stability and the reproductivity against a high temperature heat treatment, and by reducing the resistivity of the electrodes.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7366675A JPS51150281A (en) | 1975-06-19 | 1975-06-19 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7366675A JPS51150281A (en) | 1975-06-19 | 1975-06-19 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51150281A true JPS51150281A (en) | 1976-12-23 |
Family
ID=13524791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7366675A Pending JPS51150281A (en) | 1975-06-19 | 1975-06-19 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51150281A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6286865A (en) * | 1985-10-14 | 1987-04-21 | Mitsubishi Electric Corp | Mos transistor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840818A (en) * | 1971-09-27 | 1973-06-15 |
-
1975
- 1975-06-19 JP JP7366675A patent/JPS51150281A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840818A (en) * | 1971-09-27 | 1973-06-15 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6286865A (en) * | 1985-10-14 | 1987-04-21 | Mitsubishi Electric Corp | Mos transistor |
JPH0478188B2 (en) * | 1985-10-14 | 1992-12-10 | Mitsubishi Electric Corp |
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