JPS54128687A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS54128687A JPS54128687A JP3748578A JP3748578A JPS54128687A JP S54128687 A JPS54128687 A JP S54128687A JP 3748578 A JP3748578 A JP 3748578A JP 3748578 A JP3748578 A JP 3748578A JP S54128687 A JPS54128687 A JP S54128687A
- Authority
- JP
- Japan
- Prior art keywords
- film
- wiring
- insulation film
- enclosed
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000009413 insulation Methods 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- 229920001721 polyimide Polymers 0.000 abstract 2
- 239000011347 resin Substances 0.000 abstract 2
- 229920005989 resin Polymers 0.000 abstract 2
- 239000004642 Polyimide Substances 0.000 abstract 1
- 229910018885 Pt—Au Inorganic materials 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3748578A JPS54128687A (en) | 1978-03-30 | 1978-03-30 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3748578A JPS54128687A (en) | 1978-03-30 | 1978-03-30 | Semiconductor device and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54128687A true JPS54128687A (en) | 1979-10-05 |
| JPS6128212B2 JPS6128212B2 (enrdf_load_stackoverflow) | 1986-06-28 |
Family
ID=12498814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3748578A Granted JPS54128687A (en) | 1978-03-30 | 1978-03-30 | Semiconductor device and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54128687A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020059525A1 (ja) | 2018-09-21 | 2020-03-26 | 東洋製罐グループホールディングス株式会社 | ナノセルロース及びその製造方法 |
-
1978
- 1978-03-30 JP JP3748578A patent/JPS54128687A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6128212B2 (enrdf_load_stackoverflow) | 1986-06-28 |
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