JPS5534433A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS5534433A JPS5534433A JP10661278A JP10661278A JPS5534433A JP S5534433 A JPS5534433 A JP S5534433A JP 10661278 A JP10661278 A JP 10661278A JP 10661278 A JP10661278 A JP 10661278A JP S5534433 A JPS5534433 A JP S5534433A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- mask
- sio
- spaces
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To selectively mount diffused regions that mutual spaces are accurately set, by placing mask layers, which spaces are prescribed highly precise, on a semiconductor substrate, by forming layer containing impurities on the layers and by thermally treating these layers.
CONSTITUTION: Mask layers 12A and 12B that workability is excellent, the accuracy of etching is high and have mask effect to impurities are made up on a semiconductor substrate such as a P type Si substrate 11 at regular intervals by Si3N4. A layer 13 containing impurities, such as, B dope SiO2, etc. and an insulating layer 14, which does not contain impurities, such as, SiO2, etc., are successively built up on the layers. These insulating layers existing between the mask layers 12A, 12B are selectively removed, a thin insulating layer 16 of SiO2, etc. is formed on the substrate 11 exposed, and these layers are thermally treated, thus making up N type diffused layers 17 and 18, which spaces are prescribed by means of the mask layers. Consequently, this MOS device that the length of channels is decided highly precise can be prepared.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10661278A JPS5534433A (en) | 1978-08-31 | 1978-08-31 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10661278A JPS5534433A (en) | 1978-08-31 | 1978-08-31 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5534433A true JPS5534433A (en) | 1980-03-11 |
Family
ID=14437934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10661278A Pending JPS5534433A (en) | 1978-08-31 | 1978-08-31 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5534433A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6127180U (en) * | 1984-07-20 | 1986-02-18 | スタンレー電気株式会社 | display device |
JPS63115194A (en) * | 1986-10-31 | 1988-05-19 | 日本精機株式会社 | Display device |
JPH0164687U (en) * | 1987-10-20 | 1989-04-25 |
-
1978
- 1978-08-31 JP JP10661278A patent/JPS5534433A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6127180U (en) * | 1984-07-20 | 1986-02-18 | スタンレー電気株式会社 | display device |
JPS63115194A (en) * | 1986-10-31 | 1988-05-19 | 日本精機株式会社 | Display device |
JPH0164687U (en) * | 1987-10-20 | 1989-04-25 |
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