JPS5412269A - Forming method of photo masks - Google Patents

Forming method of photo masks

Info

Publication number
JPS5412269A
JPS5412269A JP7684377A JP7684377A JPS5412269A JP S5412269 A JPS5412269 A JP S5412269A JP 7684377 A JP7684377 A JP 7684377A JP 7684377 A JP7684377 A JP 7684377A JP S5412269 A JPS5412269 A JP S5412269A
Authority
JP
Japan
Prior art keywords
photo masks
forming method
patterns
basic patterns
demensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7684377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6238695B2 (cg-RX-API-DMAC7.html
Inventor
Shigeharu Abe
Kazuo Tokitomo
Satoshi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7684377A priority Critical patent/JPS5412269A/ja
Publication of JPS5412269A publication Critical patent/JPS5412269A/ja
Publication of JPS6238695B2 publication Critical patent/JPS6238695B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP7684377A 1977-06-28 1977-06-28 Forming method of photo masks Granted JPS5412269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7684377A JPS5412269A (en) 1977-06-28 1977-06-28 Forming method of photo masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7684377A JPS5412269A (en) 1977-06-28 1977-06-28 Forming method of photo masks

Publications (2)

Publication Number Publication Date
JPS5412269A true JPS5412269A (en) 1979-01-29
JPS6238695B2 JPS6238695B2 (cg-RX-API-DMAC7.html) 1987-08-19

Family

ID=13616934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7684377A Granted JPS5412269A (en) 1977-06-28 1977-06-28 Forming method of photo masks

Country Status (1)

Country Link
JP (1) JPS5412269A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS6238695B2 (cg-RX-API-DMAC7.html) 1987-08-19

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