JPS54116884A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS54116884A
JPS54116884A JP2418378A JP2418378A JPS54116884A JP S54116884 A JPS54116884 A JP S54116884A JP 2418378 A JP2418378 A JP 2418378A JP 2418378 A JP2418378 A JP 2418378A JP S54116884 A JPS54116884 A JP S54116884A
Authority
JP
Japan
Prior art keywords
concavity
region
film
sio
base region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2418378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5731663B2 (enExample
Inventor
Minoru Matsumoto
Sadaichi Inaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2418378A priority Critical patent/JPS54116884A/ja
Publication of JPS54116884A publication Critical patent/JPS54116884A/ja
Publication of JPS5731663B2 publication Critical patent/JPS5731663B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2418378A 1978-03-03 1978-03-03 Semiconductor device Granted JPS54116884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2418378A JPS54116884A (en) 1978-03-03 1978-03-03 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2418378A JPS54116884A (en) 1978-03-03 1978-03-03 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS54116884A true JPS54116884A (en) 1979-09-11
JPS5731663B2 JPS5731663B2 (enExample) 1982-07-06

Family

ID=12131215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2418378A Granted JPS54116884A (en) 1978-03-03 1978-03-03 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS54116884A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098667A (ja) * 1983-11-02 1985-06-01 Seiko Epson Corp 半導体装置
WO1985003597A1 (en) * 1984-02-03 1985-08-15 Advanced Micro Devices, Inc. A bipolar transistor with active elements formed in slots

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61189289U (enExample) * 1985-05-17 1986-11-26

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145276A (en) * 1975-06-10 1976-12-14 Mitsubishi Electric Corp Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145276A (en) * 1975-06-10 1976-12-14 Mitsubishi Electric Corp Semiconductor device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098667A (ja) * 1983-11-02 1985-06-01 Seiko Epson Corp 半導体装置
WO1985003597A1 (en) * 1984-02-03 1985-08-15 Advanced Micro Devices, Inc. A bipolar transistor with active elements formed in slots
US4733287A (en) * 1984-02-03 1988-03-22 Advanced Micro Devices, Inc. Integrated circuit structure with active elements of bipolar transistor formed in slots
US4749661A (en) * 1984-02-03 1988-06-07 Advanced Micro Devices, Inc. Vertical slot bottom bipolar transistor structure
US4795721A (en) * 1984-02-03 1989-01-03 Advanced Micro Devices, Inc. Walled slot devices and method of making same
US4803176A (en) * 1984-02-03 1989-02-07 Advanced Micro Devices, Inc. Integrated circuit structure with active device in merged slot and method of making same
JPH06101470B2 (ja) * 1984-02-03 1994-12-12 アドバンスト・マイクロ・ディバイシズ・インコ−ポレ−テッド スロット内に形成されたバイポーラトランジスタからなる能動要素を有する集積回路装置

Also Published As

Publication number Publication date
JPS5731663B2 (enExample) 1982-07-06

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