JPS54112744A - Selectively etching method for insulating layer - Google Patents

Selectively etching method for insulating layer

Info

Publication number
JPS54112744A
JPS54112744A JP1984378A JP1984378A JPS54112744A JP S54112744 A JPS54112744 A JP S54112744A JP 1984378 A JP1984378 A JP 1984378A JP 1984378 A JP1984378 A JP 1984378A JP S54112744 A JPS54112744 A JP S54112744A
Authority
JP
Japan
Prior art keywords
layer
insulating layer
etching
photoresist film
etch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984378A
Other languages
English (en)
Other versions
JPS6050873B2 (ja
Inventor
Norio Anzai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1984378A priority Critical patent/JPS6050873B2/ja
Publication of JPS54112744A publication Critical patent/JPS54112744A/ja
Publication of JPS6050873B2 publication Critical patent/JPS6050873B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1984378A 1978-02-24 1978-02-24 絶縁層に対する選択的エツチング法 Expired JPS6050873B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984378A JPS6050873B2 (ja) 1978-02-24 1978-02-24 絶縁層に対する選択的エツチング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984378A JPS6050873B2 (ja) 1978-02-24 1978-02-24 絶縁層に対する選択的エツチング法

Publications (2)

Publication Number Publication Date
JPS54112744A true JPS54112744A (en) 1979-09-03
JPS6050873B2 JPS6050873B2 (ja) 1985-11-11

Family

ID=12010537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984378A Expired JPS6050873B2 (ja) 1978-02-24 1978-02-24 絶縁層に対する選択的エツチング法

Country Status (1)

Country Link
JP (1) JPS6050873B2 (ja)

Also Published As

Publication number Publication date
JPS6050873B2 (ja) 1985-11-11

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