JPS54100910A - Method and apparatus for glow discharge processing - Google Patents

Method and apparatus for glow discharge processing

Info

Publication number
JPS54100910A
JPS54100910A JP720278A JP720278A JPS54100910A JP S54100910 A JPS54100910 A JP S54100910A JP 720278 A JP720278 A JP 720278A JP 720278 A JP720278 A JP 720278A JP S54100910 A JPS54100910 A JP S54100910A
Authority
JP
Japan
Prior art keywords
objects
glow discharge
treated
cathode
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP720278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154868B2 (enrdf_load_stackoverflow
Inventor
Naotatsu Asahi
Shizuka Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP720278A priority Critical patent/JPS54100910A/ja
Publication of JPS54100910A publication Critical patent/JPS54100910A/ja
Publication of JPS6154868B2 publication Critical patent/JPS6154868B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP720278A 1978-01-27 1978-01-27 Method and apparatus for glow discharge processing Granted JPS54100910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP720278A JPS54100910A (en) 1978-01-27 1978-01-27 Method and apparatus for glow discharge processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP720278A JPS54100910A (en) 1978-01-27 1978-01-27 Method and apparatus for glow discharge processing

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP24750084A Division JPS60243262A (ja) 1984-11-22 1984-11-22 グロ−放電処理方法

Publications (2)

Publication Number Publication Date
JPS54100910A true JPS54100910A (en) 1979-08-09
JPS6154868B2 JPS6154868B2 (enrdf_load_stackoverflow) 1986-11-25

Family

ID=11659432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP720278A Granted JPS54100910A (en) 1978-01-27 1978-01-27 Method and apparatus for glow discharge processing

Country Status (1)

Country Link
JP (1) JPS54100910A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6154868B2 (enrdf_load_stackoverflow) 1986-11-25

Similar Documents

Publication Publication Date Title
IE830747L (en) Plasma treatment process
GB1446500A (en) Corona discharge method of depleting alkali metal ions from a glass surface region
JPS5368171A (en) Method and apparatus for plasma treatment
GB994911A (en) Improvements in or relating to sputtering apparatus
JPS5676242A (en) Treating apparatus using gas plasma reaction
CA2048470A1 (en) Plasma processing apparatus having an electrode enclosing the space between cathode and anode
JPS54100910A (en) Method and apparatus for glow discharge processing
JPS53137010A (en) Surface treating apparatus
JPS5480373A (en) Method of treating high-polymer resin with electrical discharge
JPS56130466A (en) Film forming method
JPS5531139A (en) Ion-treating apparatus
JPS57140875A (en) Continuous sputtering method
JPS5710629A (en) Plasma treatment of hollow body
JPS5235766A (en) Waste fluid treatment apparatus
JPS539082A (en) Gas exhausting device for fluorescent lamp
JPS5794565A (en) Surface treatment of pipe
JPS5468169A (en) Plasma processor of capacitor type
JPS57135836A (en) Glow discharge treatment
FR2403645A2 (fr) Four pour le traitement thermochimique, en continu, de pieces metalliques, par bombardement ionique
JPS51134387A (en) Process for producing a graphite electrode material
JPS5232887A (en) Equipment for electrolytic treatment
JPS54117153A (en) Water treating apparatus
JPS5778941A (en) Method and apparatus for plasma deposition
JPS55122875A (en) Surface-treating method
JPS57131363A (en) Ion plating device