JPS5391635A - Forming method for magnetic film pattern - Google Patents

Forming method for magnetic film pattern

Info

Publication number
JPS5391635A
JPS5391635A JP657177A JP657177A JPS5391635A JP S5391635 A JPS5391635 A JP S5391635A JP 657177 A JP657177 A JP 657177A JP 657177 A JP657177 A JP 657177A JP S5391635 A JPS5391635 A JP S5391635A
Authority
JP
Japan
Prior art keywords
magnetic film
film pattern
forming method
pattern
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP657177A
Other languages
Japanese (ja)
Other versions
JPS608549B2 (en
Inventor
Koichi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP657177A priority Critical patent/JPS608549B2/en
Publication of JPS5391635A publication Critical patent/JPS5391635A/en
Publication of JPS608549B2 publication Critical patent/JPS608549B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain good cutting of pattern and to decrease the anti magnetic force, by keeping the raw substrate on which resist pattern is formed at a low temperature and by lowering the anti magnetic force of the magnetic film after forming the magnetic film pattern with removal of resist.
COPYRIGHT: (C)1978,JPO&Japio
JP657177A 1977-01-24 1977-01-24 Magnetic film pattern creation method Expired JPS608549B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP657177A JPS608549B2 (en) 1977-01-24 1977-01-24 Magnetic film pattern creation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP657177A JPS608549B2 (en) 1977-01-24 1977-01-24 Magnetic film pattern creation method

Publications (2)

Publication Number Publication Date
JPS5391635A true JPS5391635A (en) 1978-08-11
JPS608549B2 JPS608549B2 (en) 1985-03-04

Family

ID=11642013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP657177A Expired JPS608549B2 (en) 1977-01-24 1977-01-24 Magnetic film pattern creation method

Country Status (1)

Country Link
JP (1) JPS608549B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882225A (en) * 1981-10-03 1983-05-17 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Magneto-optic modulator and manufacture thereof
JPS5948887A (en) * 1982-09-13 1984-03-21 Fujitsu Ltd Production of magnetic bubble element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882225A (en) * 1981-10-03 1983-05-17 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Magneto-optic modulator and manufacture thereof
JPS5948887A (en) * 1982-09-13 1984-03-21 Fujitsu Ltd Production of magnetic bubble element

Also Published As

Publication number Publication date
JPS608549B2 (en) 1985-03-04

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