JPS52115661A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52115661A
JPS52115661A JP3283076A JP3283076A JPS52115661A JP S52115661 A JPS52115661 A JP S52115661A JP 3283076 A JP3283076 A JP 3283076A JP 3283076 A JP3283076 A JP 3283076A JP S52115661 A JPS52115661 A JP S52115661A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
easy
bsg
psg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3283076A
Other languages
Japanese (ja)
Inventor
Kazunari Shirai
Atsushi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3283076A priority Critical patent/JPS52115661A/en
Publication of JPS52115661A publication Critical patent/JPS52115661A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a semiconductor device having a protecting film which is easy to melt at high temperature and permits easy formation of fine patterns by forming a PSG-BSG mixed film.
COPYRIGHT: (C)1977,JPO&Japio
JP3283076A 1976-03-24 1976-03-24 Production of semiconductor device Pending JPS52115661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3283076A JPS52115661A (en) 1976-03-24 1976-03-24 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3283076A JPS52115661A (en) 1976-03-24 1976-03-24 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52115661A true JPS52115661A (en) 1977-09-28

Family

ID=12369734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3283076A Pending JPS52115661A (en) 1976-03-24 1976-03-24 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52115661A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61135127A (en) * 1984-12-05 1986-06-23 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61135127A (en) * 1984-12-05 1986-06-23 Fujitsu Ltd Manufacture of semiconductor device

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