JPS5386159A - Diffusion method of compound semiconductor - Google Patents
Diffusion method of compound semiconductorInfo
- Publication number
- JPS5386159A JPS5386159A JP68177A JP68177A JPS5386159A JP S5386159 A JPS5386159 A JP S5386159A JP 68177 A JP68177 A JP 68177A JP 68177 A JP68177 A JP 68177A JP S5386159 A JPS5386159 A JP S5386159A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- diffusion method
- compound semiconductors
- obviate
- deterioration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prevent the deterioration of surface and obviate the decrease in surface concentration by sealing second compound semiconductors which have easier tendency to thermal decomposition than first compound semiconductors together with the first compound semiconductors and performing diffusion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP68177A JPS6053455B2 (en) | 1977-01-06 | 1977-01-06 | Compound semiconductor diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP68177A JPS6053455B2 (en) | 1977-01-06 | 1977-01-06 | Compound semiconductor diffusion method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5386159A true JPS5386159A (en) | 1978-07-29 |
JPS6053455B2 JPS6053455B2 (en) | 1985-11-26 |
Family
ID=11480489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP68177A Expired JPS6053455B2 (en) | 1977-01-06 | 1977-01-06 | Compound semiconductor diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6053455B2 (en) |
-
1977
- 1977-01-06 JP JP68177A patent/JPS6053455B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6053455B2 (en) | 1985-11-26 |
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