JPS5386159A - Diffusion method of compound semiconductor - Google Patents

Diffusion method of compound semiconductor

Info

Publication number
JPS5386159A
JPS5386159A JP68177A JP68177A JPS5386159A JP S5386159 A JPS5386159 A JP S5386159A JP 68177 A JP68177 A JP 68177A JP 68177 A JP68177 A JP 68177A JP S5386159 A JPS5386159 A JP S5386159A
Authority
JP
Japan
Prior art keywords
compound semiconductor
diffusion method
compound semiconductors
obviate
deterioration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP68177A
Other languages
Japanese (ja)
Other versions
JPS6053455B2 (en
Inventor
Yoshiyuki Hayakawa
Tsutomu Koshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP68177A priority Critical patent/JPS6053455B2/en
Publication of JPS5386159A publication Critical patent/JPS5386159A/en
Publication of JPS6053455B2 publication Critical patent/JPS6053455B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the deterioration of surface and obviate the decrease in surface concentration by sealing second compound semiconductors which have easier tendency to thermal decomposition than first compound semiconductors together with the first compound semiconductors and performing diffusion.
COPYRIGHT: (C)1978,JPO&Japio
JP68177A 1977-01-06 1977-01-06 Compound semiconductor diffusion method Expired JPS6053455B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP68177A JPS6053455B2 (en) 1977-01-06 1977-01-06 Compound semiconductor diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP68177A JPS6053455B2 (en) 1977-01-06 1977-01-06 Compound semiconductor diffusion method

Publications (2)

Publication Number Publication Date
JPS5386159A true JPS5386159A (en) 1978-07-29
JPS6053455B2 JPS6053455B2 (en) 1985-11-26

Family

ID=11480489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP68177A Expired JPS6053455B2 (en) 1977-01-06 1977-01-06 Compound semiconductor diffusion method

Country Status (1)

Country Link
JP (1) JPS6053455B2 (en)

Also Published As

Publication number Publication date
JPS6053455B2 (en) 1985-11-26

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