JPS538562A - Growing method of perfect silicon single crystal - Google Patents

Growing method of perfect silicon single crystal

Info

Publication number
JPS538562A
JPS538562A JP8264976A JP8264976A JPS538562A JP S538562 A JPS538562 A JP S538562A JP 8264976 A JP8264976 A JP 8264976A JP 8264976 A JP8264976 A JP 8264976A JP S538562 A JPS538562 A JP S538562A
Authority
JP
Japan
Prior art keywords
single crystal
silicon single
growing method
perfect silicon
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8264976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5543435B2 (ca
Inventor
Shozo Shirai
Junichi Senkawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Japan Broadcasting Corp
Original Assignee
Nippon Hoso Kyokai NHK
Shin Etsu Handotai Co Ltd
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Hoso Kyokai NHK, Shin Etsu Handotai Co Ltd, Japan Broadcasting Corp filed Critical Nippon Hoso Kyokai NHK
Priority to JP8264976A priority Critical patent/JPS538562A/ja
Publication of JPS538562A publication Critical patent/JPS538562A/ja
Publication of JPS5543435B2 publication Critical patent/JPS5543435B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8264976A 1976-07-12 1976-07-12 Growing method of perfect silicon single crystal Granted JPS538562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8264976A JPS538562A (en) 1976-07-12 1976-07-12 Growing method of perfect silicon single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8264976A JPS538562A (en) 1976-07-12 1976-07-12 Growing method of perfect silicon single crystal

Publications (2)

Publication Number Publication Date
JPS538562A true JPS538562A (en) 1978-01-26
JPS5543435B2 JPS5543435B2 (ca) 1980-11-06

Family

ID=13780267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8264976A Granted JPS538562A (en) 1976-07-12 1976-07-12 Growing method of perfect silicon single crystal

Country Status (1)

Country Link
JP (1) JPS538562A (ca)

Also Published As

Publication number Publication date
JPS5543435B2 (ca) 1980-11-06

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