JPS5376781A - Production of piezoelectric substarate for elastic surface waves - Google Patents
Production of piezoelectric substarate for elastic surface wavesInfo
- Publication number
- JPS5376781A JPS5376781A JP15193676A JP15193676A JPS5376781A JP S5376781 A JPS5376781 A JP S5376781A JP 15193676 A JP15193676 A JP 15193676A JP 15193676 A JP15193676 A JP 15193676A JP S5376781 A JPS5376781 A JP S5376781A
- Authority
- JP
- Japan
- Prior art keywords
- substarate
- piezoelectric
- production
- surface waves
- elastic surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15193676A JPS5376781A (en) | 1976-12-20 | 1976-12-20 | Production of piezoelectric substarate for elastic surface waves |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15193676A JPS5376781A (en) | 1976-12-20 | 1976-12-20 | Production of piezoelectric substarate for elastic surface waves |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5376781A true JPS5376781A (en) | 1978-07-07 |
JPS5633873B2 JPS5633873B2 (US20080094685A1-20080424-C00004.png) | 1981-08-06 |
Family
ID=15529430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15193676A Granted JPS5376781A (en) | 1976-12-20 | 1976-12-20 | Production of piezoelectric substarate for elastic surface waves |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5376781A (US20080094685A1-20080424-C00004.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08321445A (ja) * | 1995-05-25 | 1996-12-03 | Sumitomo Electric Ind Ltd | マイクロデバイス基板およびマイクロデバイス基板の製造方法 |
-
1976
- 1976-12-20 JP JP15193676A patent/JPS5376781A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08321445A (ja) * | 1995-05-25 | 1996-12-03 | Sumitomo Electric Ind Ltd | マイクロデバイス基板およびマイクロデバイス基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5633873B2 (US20080094685A1-20080424-C00004.png) | 1981-08-06 |
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