JPS5376054A - Method of position detection - Google Patents

Method of position detection

Info

Publication number
JPS5376054A
JPS5376054A JP15089776A JP15089776A JPS5376054A JP S5376054 A JPS5376054 A JP S5376054A JP 15089776 A JP15089776 A JP 15089776A JP 15089776 A JP15089776 A JP 15089776A JP S5376054 A JPS5376054 A JP S5376054A
Authority
JP
Japan
Prior art keywords
wafer
position detection
underside
mask
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15089776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5618082B2 (cs
Inventor
Kayao Takemoto
Masaru Miyazaki
Satoru Nakayama
Yoshiaki Mimura
Jiyunji Matsui
Takanao Shiratori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Hitachi Ltd
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Hitachi Ltd
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Hitachi Ltd, NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical Fujitsu Ltd
Priority to JP15089776A priority Critical patent/JPS5376054A/ja
Publication of JPS5376054A publication Critical patent/JPS5376054A/ja
Publication of JPS5618082B2 publication Critical patent/JPS5618082B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15089776A 1976-12-17 1976-12-17 Method of position detection Granted JPS5376054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15089776A JPS5376054A (en) 1976-12-17 1976-12-17 Method of position detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15089776A JPS5376054A (en) 1976-12-17 1976-12-17 Method of position detection

Publications (2)

Publication Number Publication Date
JPS5376054A true JPS5376054A (en) 1978-07-06
JPS5618082B2 JPS5618082B2 (cs) 1981-04-27

Family

ID=15506756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15089776A Granted JPS5376054A (en) 1976-12-17 1976-12-17 Method of position detection

Country Status (1)

Country Link
JP (1) JPS5376054A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175421A (ja) * 1983-11-09 1985-09-09 アメリカン　テレフォン　アンド　テレグラフ　カムパニー 半導体デバイスの製作方法
JP2011129912A (ja) * 2009-12-18 2011-06-30 Asml Netherlands Bv リソグラフィ装置および方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175421A (ja) * 1983-11-09 1985-09-09 アメリカン　テレフォン　アンド　テレグラフ　カムパニー 半導体デバイスの製作方法
JP2011129912A (ja) * 2009-12-18 2011-06-30 Asml Netherlands Bv リソグラフィ装置および方法

Also Published As

Publication number Publication date
JPS5618082B2 (cs) 1981-04-27

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