JPS5618082B2 - - Google Patents

Info

Publication number
JPS5618082B2
JPS5618082B2 JP15089776A JP15089776A JPS5618082B2 JP S5618082 B2 JPS5618082 B2 JP S5618082B2 JP 15089776 A JP15089776 A JP 15089776A JP 15089776 A JP15089776 A JP 15089776A JP S5618082 B2 JPS5618082 B2 JP S5618082B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15089776A
Other languages
Japanese (ja)
Other versions
JPS5376054A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15089776A priority Critical patent/JPS5376054A/ja
Publication of JPS5376054A publication Critical patent/JPS5376054A/ja
Publication of JPS5618082B2 publication Critical patent/JPS5618082B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15089776A 1976-12-17 1976-12-17 Method of position detection Granted JPS5376054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15089776A JPS5376054A (en) 1976-12-17 1976-12-17 Method of position detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15089776A JPS5376054A (en) 1976-12-17 1976-12-17 Method of position detection

Publications (2)

Publication Number Publication Date
JPS5376054A JPS5376054A (en) 1978-07-06
JPS5618082B2 true JPS5618082B2 (cs) 1981-04-27

Family

ID=15506756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15089776A Granted JPS5376054A (en) 1976-12-17 1976-12-17 Method of position detection

Country Status (1)

Country Link
JP (1) JPS5376054A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4470875A (en) * 1983-11-09 1984-09-11 At&T Bell Laboratories Fabrication of silicon devices requiring anisotropic etching
NL2005378A (en) * 2009-12-18 2011-06-21 Asml Netherlands Bv Lithographic apparatus and method.

Also Published As

Publication number Publication date
JPS5376054A (en) 1978-07-06

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