JPS5375176A - Liquid phase epotaxial growth method of compound semiconductor - Google Patents
Liquid phase epotaxial growth method of compound semiconductorInfo
- Publication number
- JPS5375176A JPS5375176A JP15108776A JP15108776A JPS5375176A JP S5375176 A JPS5375176 A JP S5375176A JP 15108776 A JP15108776 A JP 15108776A JP 15108776 A JP15108776 A JP 15108776A JP S5375176 A JPS5375176 A JP S5375176A
- Authority
- JP
- Japan
- Prior art keywords
- epotaxial
- liquid phase
- compound semiconductor
- growth method
- temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To grow up epitaxial crystal layer having good surface condition with good reproducibility, by contacting substrate plate for seed crystal with melting liquid during the course of temp. rinsing to make both familiar.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15108776A JPS5375176A (en) | 1976-12-15 | 1976-12-15 | Liquid phase epotaxial growth method of compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15108776A JPS5375176A (en) | 1976-12-15 | 1976-12-15 | Liquid phase epotaxial growth method of compound semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5375176A true JPS5375176A (en) | 1978-07-04 |
Family
ID=15511030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15108776A Pending JPS5375176A (en) | 1976-12-15 | 1976-12-15 | Liquid phase epotaxial growth method of compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5375176A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5021222A (en) * | 1973-06-27 | 1975-03-06 | ||
JPS5184578A (en) * | 1975-01-21 | 1976-07-23 | Sharp Kk | HANDOTAIKETSUSHONOSEIZOHO |
-
1976
- 1976-12-15 JP JP15108776A patent/JPS5375176A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5021222A (en) * | 1973-06-27 | 1975-03-06 | ||
JPS5184578A (en) * | 1975-01-21 | 1976-07-23 | Sharp Kk | HANDOTAIKETSUSHONOSEIZOHO |
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