JPS537118B1 - - Google Patents

Info

Publication number
JPS537118B1
JPS537118B1 JP5178472A JP5178472A JPS537118B1 JP S537118 B1 JPS537118 B1 JP S537118B1 JP 5178472 A JP5178472 A JP 5178472A JP 5178472 A JP5178472 A JP 5178472A JP S537118 B1 JPS537118 B1 JP S537118B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5178472A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS537118B1 publication Critical patent/JPS537118B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/10—Associated with forming or dispersing groups of intersupporting articles, e.g. stacking patterns
    • Y10S414/101—Associated with forming or dispersing groups of intersupporting articles, e.g. stacking patterns with article-supporting fluid cushion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5178472A 1971-06-01 1972-05-26 Pending JPS537118B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14837171A 1971-06-01 1971-06-01

Publications (1)

Publication Number Publication Date
JPS537118B1 true JPS537118B1 (ja) 1978-03-14

Family

ID=22525483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5178472A Pending JPS537118B1 (ja) 1971-06-01 1972-05-26

Country Status (5)

Country Link
US (1) US3731823A (ja)
JP (1) JPS537118B1 (ja)
DE (1) DE2225326C2 (ja)
FR (1) FR2139881B1 (ja)
GB (1) GB1358513A (ja)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947236A (en) * 1971-11-29 1976-03-30 Lasch Jr Cecil A Fluid bearing transfer and heat treating apparatus and method
US3870460A (en) * 1974-04-03 1975-03-11 Gca Corp Single or multi-track fluid bearing heating apparatus and method
GB1499534A (en) * 1974-04-30 1978-02-01 Bridgestone Tire Co Ltd Combination of a truck and apparatus for loading sheet materials on a plurality of shelves on the truck
US3923342A (en) * 1974-06-10 1975-12-02 Motorola Inc Apparatus and method for handling frangible objects
US3982790A (en) * 1975-04-04 1976-09-28 Donald William Storm Aerodynamic product unscrambling system and methods of constructing and utilizing same
DE2648226A1 (de) * 1975-10-31 1977-05-05 Xerox Corp Verfahren zum foerdern und ausrichten von aufeinandergestapelten blaettern
US4171131A (en) * 1975-10-31 1979-10-16 Xerox Corporation Pneumatic registration apparatus
DE2554395C3 (de) * 1975-12-03 1979-04-12 Windmoeller & Hoelscher, 4540 Lengerich Vorrichtung zum Herstellen von Stapeln aus Kunststoffbeuteln
US4027246A (en) * 1976-03-26 1977-05-31 International Business Machines Corporation Automated integrated circuit manufacturing system
US4178113A (en) * 1977-12-05 1979-12-11 Macronetics, Inc. Buffer storage apparatus for semiconductor wafer processing
US4293249A (en) * 1980-03-03 1981-10-06 Texas Instruments Incorporated Material handling system and method for manufacturing line
US4600471A (en) * 1981-08-26 1986-07-15 Integrated Automation, Limited Method and apparatus for transport and processing of substrate with developing agent
NL8203318A (nl) * 1982-08-24 1984-03-16 Integrated Automation Inrichting voor processing van substraten.
US4622918A (en) * 1983-01-31 1986-11-18 Integrated Automation Limited Module for high vacuum processing
DE3512584A1 (de) * 1985-04-06 1986-10-30 Frank, Gabriele, 6333 Braunfels Anlage zum pneumatischen schwebefoerdern, stueckartige gueter
DE3546553A1 (de) * 1985-10-12 1987-11-12 Ilsemann Heino Vorrichtung zum einbringen von aufzeichnungstraegern mit mehreren beilagen in ein unterteil aufweisende aufnahmeboxen
US4655677A (en) * 1985-12-16 1987-04-07 Precision Metal Fabricators, Inc. Method for handling container ends en masse
DE3716549A1 (de) * 1987-05-17 1988-12-08 Leitz Ernst Gmbh Handhabungsautomat fuer plattenfoermige objekte
DE3811808A1 (de) * 1988-04-08 1989-10-19 Weber Erich Dipl Ing Fh Verfahren und vorrichtung zum transportieren elektrischer leiterplatten
CH678164A5 (ja) * 1988-06-09 1991-08-15 Robitron Ag
DE4038587A1 (de) * 1990-12-04 1992-06-11 Hamatech Halbleiter Maschinenb Transportvorrichtung fuer substrate
EP0525364A1 (de) * 1991-08-01 1993-02-03 Löhr & Herrmann GmbH Vorrichtung zum Speichern und Transportieren von oberflächenempfindlichen Leiterplatten
US5246097A (en) * 1992-10-21 1993-09-21 Simplimatic Engineering Company Line changing system for air bottle conveyors
US5567091A (en) * 1995-05-02 1996-10-22 R. A. Pearson Company Swing-arm air conveyor and flexible guide joint for conveying bottles with neck flanges
JP3581000B2 (ja) * 1997-01-10 2004-10-27 日本碍子株式会社 物品搬送装置
US6183183B1 (en) 1997-01-16 2001-02-06 Asm America, Inc. Dual arm linear hand-off wafer transfer assembly
US6203250B1 (en) * 1997-12-16 2001-03-20 Ngk Insulators, Ltd. Article feeding apparatus
US6336775B1 (en) * 1998-08-20 2002-01-08 Matsushita Electric Industrial Co., Ltd. Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus
US6280291B1 (en) 1999-02-16 2001-08-28 Speedfam-Ipec Corporation Wafer sensor utilizing hydrodynamic pressure differential
DE19907706A1 (de) * 1999-02-23 2000-08-24 Krauss Maffei Kunststofftech Vorrichtung zum Transportieren von scheibenförmigen Substraten
DE10062954B4 (de) * 2000-12-16 2004-04-15 Schott Glas Vorrichtung zum Erzeugen von Glasgobs
US6461085B1 (en) * 2001-03-16 2002-10-08 Toda Citron Technologies, Inc. Sputter pallet loader
DE10305422B4 (de) * 2003-02-05 2006-01-19 Schott Ag Verfahren zur Herstellung von Kugeln mit optischer Qualität aus zähem Glas
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
US6905300B1 (en) * 2004-01-16 2005-06-14 Dmetrix, Inc. Slide feeder with air bearing conveyor
EP2096192A1 (en) * 2008-02-28 2009-09-02 Applied Materials, Inc. Backside coating prevention device.
JP4751460B2 (ja) * 2009-02-18 2011-08-17 東京エレクトロン株式会社 基板搬送装置及び基板処理システム
DE102009016182B3 (de) * 2009-04-03 2010-04-08 Uhlmann Pac-Systeme Gmbh & Co Kg Transportanlage für flache Gegenstände
KR102172551B1 (ko) * 2010-02-17 2020-11-02 가부시키가이샤 니콘 반송 장치, 반송 방법, 노광 장치, 및 디바이스 제조 방법
GB2502617B (en) * 2012-06-01 2017-01-18 Dtg Int Gmbh Apparatus for and method of aligning and transporting workpieces
CN103754645A (zh) * 2014-01-24 2014-04-30 江西铜业股份有限公司 一种铜精矿输送方法
US10086526B2 (en) * 2016-10-04 2018-10-02 Geo. M. Martin Company Puffer pan
WO2019026916A1 (ja) * 2017-08-01 2019-02-07 株式会社新川 フレームフィーダ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2678273A (en) * 1948-07-26 1954-05-11 Warner Brothers Pictures Inc Photographic light balancing method
US2917991A (en) * 1957-02-11 1959-12-22 Asa B Segur Packaging apparatus
US2991893A (en) * 1957-12-20 1961-07-11 Telefunken Gmbh Conveyor systems
US3159398A (en) * 1962-01-22 1964-12-01 Bucciconi Eng Co Sheet piler with air flow side guides
US3160443A (en) * 1962-10-23 1964-12-08 Western Electric Co Apparatus for pneumatically conveying articles
US3210124A (en) * 1963-09-23 1965-10-05 Gen Motors Corp Air feed conveyor
US3243181A (en) * 1963-12-23 1966-03-29 Pitney Bowes Inc Sheet handling device
US3340672A (en) * 1965-01-28 1967-09-12 Emhart Corp Case packing machine for tiered articles
US3408063A (en) * 1965-11-13 1968-10-29 Messrs Hans Biel Apparatus for stacking sheets of material
US3460685A (en) * 1967-02-24 1969-08-12 Kirkhof Mfg Corp Article stack former,regulator,and handler
US3391777A (en) * 1967-06-22 1968-07-09 Curt G. Joa Pad corner transfer machine
US3588176A (en) * 1968-11-13 1971-06-28 Ibm Article transport system and method
US3645581A (en) * 1968-11-26 1972-02-29 Ind Modular Systems Corp Apparatus and method for handling and treating articles
DE1931208C3 (de) * 1969-06-20 1974-05-02 Vits-Maschinenbau Gmbh, 4018 Langenfeld Vorrichtung zum Fördern und Ablegen von Bögen aus Papier und anderem blattförmigen Material in Stapeln

Also Published As

Publication number Publication date
DE2225326C2 (de) 1982-06-16
GB1358513A (en) 1974-07-03
US3731823A (en) 1973-05-08
FR2139881B1 (ja) 1978-03-03
DE2225326A1 (de) 1972-12-14
FR2139881A1 (ja) 1973-01-12

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