GB2502617B - Apparatus for and method of aligning and transporting workpieces - Google Patents

Apparatus for and method of aligning and transporting workpieces

Info

Publication number
GB2502617B
GB2502617B GB1209810.9A GB201209810A GB2502617B GB 2502617 B GB2502617 B GB 2502617B GB 201209810 A GB201209810 A GB 201209810A GB 2502617 B GB2502617 B GB 2502617B
Authority
GB
United Kingdom
Prior art keywords
aligning
transporting workpieces
workpieces
transporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1209810.9A
Other versions
GB201209810D0 (en
GB2502617A (en
Inventor
Willshere Richard
Ogg Andrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM Assembly Systems Switzerland GmbH
Original Assignee
DTG International GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DTG International GmbH filed Critical DTG International GmbH
Priority to GB1209810.9A priority Critical patent/GB2502617B/en
Publication of GB201209810D0 publication Critical patent/GB201209810D0/en
Priority to PCT/EP2013/061261 priority patent/WO2013178786A2/en
Publication of GB2502617A publication Critical patent/GB2502617A/en
Application granted granted Critical
Publication of GB2502617B publication Critical patent/GB2502617B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
GB1209810.9A 2012-06-01 2012-06-01 Apparatus for and method of aligning and transporting workpieces Expired - Fee Related GB2502617B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1209810.9A GB2502617B (en) 2012-06-01 2012-06-01 Apparatus for and method of aligning and transporting workpieces
PCT/EP2013/061261 WO2013178786A2 (en) 2012-06-01 2013-05-31 Apparatus for and method of aligning and transporting workpieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1209810.9A GB2502617B (en) 2012-06-01 2012-06-01 Apparatus for and method of aligning and transporting workpieces

Publications (3)

Publication Number Publication Date
GB201209810D0 GB201209810D0 (en) 2012-07-18
GB2502617A GB2502617A (en) 2013-12-04
GB2502617B true GB2502617B (en) 2017-01-18

Family

ID=46582226

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1209810.9A Expired - Fee Related GB2502617B (en) 2012-06-01 2012-06-01 Apparatus for and method of aligning and transporting workpieces

Country Status (2)

Country Link
GB (1) GB2502617B (en)
WO (1) WO2013178786A2 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1268913A (en) * 1968-11-13 1972-03-29 Ibm Pneumatic transport system
GB1358513A (en) * 1971-06-01 1974-07-03 Ibm Pneumatic transport system for flat objects
US4123113A (en) * 1977-09-26 1978-10-31 Ford Motor Company Gas table
US4142661A (en) * 1977-09-21 1979-03-06 International Business Machines Corporation Differential flow guiding air bearing
JPS5957448A (en) * 1982-09-27 1984-04-03 Fujitsu Ltd Manufacturing apparatus for semiconductor device
JPS61270843A (en) * 1985-05-25 1986-12-01 Mitsubishi Electric Corp Wafer alignment mechanism
US20090173446A1 (en) * 2008-01-04 2009-07-09 Yang Dong-Ju Substrate support, substrate processing apparatus including substrate support, and method of aligning substrate
EP2355145A1 (en) * 2010-02-10 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Pressure assisted self targeting assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758330A (en) * 1980-09-24 1982-04-08 Citizen Watch Co Ltd Wafer transferring apparatus
JPS59121226A (en) * 1982-12-27 1984-07-13 Fujitsu Ltd Air bearing

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1268913A (en) * 1968-11-13 1972-03-29 Ibm Pneumatic transport system
GB1358513A (en) * 1971-06-01 1974-07-03 Ibm Pneumatic transport system for flat objects
US4142661A (en) * 1977-09-21 1979-03-06 International Business Machines Corporation Differential flow guiding air bearing
US4123113A (en) * 1977-09-26 1978-10-31 Ford Motor Company Gas table
JPS5957448A (en) * 1982-09-27 1984-04-03 Fujitsu Ltd Manufacturing apparatus for semiconductor device
JPS61270843A (en) * 1985-05-25 1986-12-01 Mitsubishi Electric Corp Wafer alignment mechanism
US20090173446A1 (en) * 2008-01-04 2009-07-09 Yang Dong-Ju Substrate support, substrate processing apparatus including substrate support, and method of aligning substrate
EP2355145A1 (en) * 2010-02-10 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Pressure assisted self targeting assembly

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Material Handling Applications with Metapor (RTM) Porous Materials, NEST Technologies, PORTEC North America, Press release, June 2002 *
Operating Instructions, Vacuum Clamping Chuck, METAPOR (RTM) Sintered metal type, August 2009 *

Also Published As

Publication number Publication date
GB201209810D0 (en) 2012-07-18
GB2502617A (en) 2013-12-04
WO2013178786A2 (en) 2013-12-05
WO2013178786A3 (en) 2014-03-06

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20190131 AND 20190206

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20190601