JPS59121226A - Air bearing - Google Patents

Air bearing

Info

Publication number
JPS59121226A
JPS59121226A JP22838882A JP22838882A JPS59121226A JP S59121226 A JPS59121226 A JP S59121226A JP 22838882 A JP22838882 A JP 22838882A JP 22838882 A JP22838882 A JP 22838882A JP S59121226 A JPS59121226 A JP S59121226A
Authority
JP
Japan
Prior art keywords
gas
transferred
blow
side wall
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22838882A
Other languages
Japanese (ja)
Inventor
Katsuyuki Arii
有井　勝之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22838882A priority Critical patent/JPS59121226A/en
Publication of JPS59121226A publication Critical patent/JPS59121226A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To contrive an improvement in reliability and productivity of a semiconductor device by preventing powder of wafer from being transferred to a processing chamber, by preventing an edge part of the wafer from damaging by providing a plurality of gas blow-off openings on wall surfaces of the inside of side walls of a transferring path. CONSTITUTION:Gas blow-off openings 16 are provided on the sides of a transferring path side of side walls 15 on both sides of an air bearing 11 and gas is made to blow off against the sides of a body 12 to be transferred, through which the body 12 to be transferred is prevented from bringing into contact with the side walls 15. It means that when the body 12 to be transferred approaches the right side wall 15, it is pushed away to the other side by the gas from the right blow-off opening 16 and then when the body 12 approaches the left side wall 15, the body 12 is pushed away to the other side contrary to the above. Although the body 12 to be transferred, therefore, repeats zigzag motion, it does not happen that the body 12 hits against the side wall 15. Lifting and transferring of the body 12 to be transferred are performed by the blow-off gas from a blow-off opening 13 provided on a floor surface 14 as usual. Wafer, therefore, can be transferred without damaging the same and reliability and productivity of the device can be improved in a production process of a semiconductor device.

Description

【発明の詳細な説明】 （１）発明の技術分野 本発明はエアヘアリング、詳しくは直進性が改良された
搬送を行うことが可能な高精度エアベアリングに関する
。DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to an air hair ring, and more particularly to a high-precision air bearing capable of conveying with improved straightness.

（２）技術の背景 エアベアリングは、現在多方面で使用されている流体に
よる浮上型（無接触型）搬送手段であり、被搬送体を無
接触状態に保ぢそれが傷付けられることを防止するので
、特にウェハやマスクのように、その表面または裏面に
傷が付くことを避ける必要のある物品の搬送に好適であ
る。加えて、エアベアリングは、物品のｊ絞込を自動化
するにも有益であるので、半導体装置の半導体装置にと
り入れられる伸開にある。(2) Background of the technology Air bearings are a floating type (non-contact type) transportation method using fluid that is currently used in many fields, and it keeps the transported object in a non-contact state and prevents it from being damaged. Therefore, it is particularly suitable for transporting items such as wafers and masks that need to be protected from being scratched on their front or back surfaces. In addition, air bearings are useful for automating the sifting of articles, and are therefore increasingly being incorporated into semiconductor devices.

第１図は従来のエアヘアリングを説明するための図で、
同図ｆａｔはその一部斜視図、（ｂｌは上記ｆａｌにお
けるＡ−Ａ線に沿った断面図で、同図を参照すると、エ
アヘアリングは平坦な搬送路４の両側に側壁５をもつ凹
形断面形状のものであり、前記搬送路４にはガス吹出口
３が規則的に配設されている。当該ガス吹出口３ば同図
（ｂｌに示す如＜、１般送方向斜め前方にガスが吹き出
すように配設され、図示しない供給装置より供給される
ガスは、これに連結する供給流路３ａを通り各吹出口３
から吹き出される。Figure 1 is a diagram to explain the conventional air hair ring.
In the same figure, fat is a partial perspective view, and (bl is a cross-sectional view taken along the line A-A in the above fal. The gas outlet 3 is regularly arranged in the conveyance path 4.The gas outlet 3 is located diagonally forward in the general feeding direction as shown in the same figure (bl). The gas is arranged so that the gas can be blown out, and the gas supplied from a supply device (not shown) passes through the supply channel 3a connected thereto and reaches each outlet 3.
It is blown out from.

上述したガスの吹出しにより例えばウエノ＼の如き被搬
送体２は、搬送路４の床面から浮上し、ガスの前方向へ
の圧力により前方に押し出され、被１ｉｆｔ送体はこの
よう、に規則的に設けられたガス吹出口３からの吹出ｔ
ガスの圧力により浮上し、無接触状態でなめらかに搬送
される。Due to the above-mentioned gas blowout, the conveyed object 2, such as Ueno\, rises from the floor of the conveyance path 4, and is pushed forward by the forward pressure of the gas, and the conveyed object 1ift is thus regularly Blowout from the gas blowout port 3 provided at
It floats up due to gas pressure and is transported smoothly without contact.

（３）従来技術と問題点 とごろで、上述した従来のエアベアリングにおいては、
同図ｆａｔに実線矢印で示す如く、被搬送体２はジグザ
グ運動をなし、側壁５に接触してその縁部分が破損する
ことが経験されている。その結果、ウェハ等の搬送体の
破損により生じる破片とか粉末が、被搬送体とともに処
理室にまで運ばれ、当該搬送体処理において前記した破
片や１５）末が被搬送体に付着し、障害となる問題が生
じている。(3) Regarding conventional technology and problems, in the conventional air bearing mentioned above,
As shown by the solid arrow in fat in the same figure, it has been experienced that the conveyed object 2 makes a zigzag movement and comes into contact with the side wall 5, causing damage to its edge portion. As a result, fragments and powder caused by damage to the carrier such as wafers are carried to the processing chamber together with the carrier, and during the processing of the carrier, the above-mentioned debris and powder (15) adhere to the carrier and cause trouble. A problem has arisen.

（４）発明の目的 本発明は、上記従来の問題に鑑み、直線性の良い搬送を
行いうる高精度エアベアリングを提供することを目的と
する。(4) Purpose of the Invention In view of the above-mentioned conventional problems, an object of the present invention is to provide a high-precision air bearing that can perform conveyance with good linearity.

（５）発明の構成 そしてこの目的は本発明によれば、搬送路床面にガス吹
出口を配設し、該搬送路両側に側壁が設けられたエアベ
アリングにおいて、前記側壁の搬送路側の壁面にガス吹
出口を配設してなることを特徴とするエアベアリングを
提供することによって達成される。(5) Structure and object of the invention According to the present invention, in an air bearing in which a gas outlet is disposed on the conveying road floor surface and side walls are provided on both sides of the conveying path, the wall surface of the side wall on the conveying path side This is achieved by providing an air bearing characterized by having a gas outlet disposed in the air bearing.

（６）発明の実′ｈ６例 以下図面によって本発明実施例を詳説する。(6) 6 examples of actual inventions Embodiments of the present invention will be explained in detail below with reference to the drawings.

第２図（ａｌは本発明実施例の斜視図、同図ｆｂ）は同
図（ａｌのＢ−Ｂ線に沿う断面図で、被搬送体１２の搬
送方向は紙面に対し垂直な方向である。FIG. 2 (al is a perspective view of the embodiment of the present invention, and FIG. 2 fb is a cross-sectional view taken along line B-B in FIG. .

同図を参照すると、エアへアリング１１には搬送路床面
のガス吹出口１３に加えて、両側の側壁１５の搬送通路
側の側面にもガス吹出口１６を設け、当該吹出口１６か
らカスを被ＩＭ、送体１２の側面に向かって吹き出させ
ることにより、被搬送体１２の側壁１５への接触を防止
する。すなわち、被搬送体１２が第１図（ａｌに見て右
の側壁１５に近ずくと、右の吹出口１６からのカスによ
ってそれは反対側（左側の側壁の方向）に押しやられ、
次に左の側壁１５に近ずくと、前とは逆に反対の方向（
右側の側壁の方向）に押しやられ、かくして被搬送体は
従来技術の場合に類似の方法でジグザグ運動を繰返しは
するが、決して側壁１５につき当ることはない。なお被
搬送体１２の持上げおよび搬送は従来通り床面１４に配
設された吹出口１３からの吹出しガスにより行われる。Referring to the same figure, in addition to the gas outlet 13 on the conveyance road floor surface, the air steering ring 11 is provided with a gas outlet 16 on the sides of the side walls 15 on both sides facing the conveyance path. By blowing out the IM toward the side surface of the conveyed body 12, the conveyed body 12 is prevented from coming into contact with the side wall 15. That is, when the conveyed object 12 approaches the right side wall 15 as seen in FIG.
Next, when approaching the left side wall 15, in the opposite direction from the front (
The conveyed object thus repeats the zigzag movement in a similar manner as in the prior art, but never hits the side wall 15. Note that lifting and conveying of the conveyed object 12 is performed by blowing gas from an outlet 13 disposed on the floor surface 14 as in the conventional manner.

かかる吹出口１６からの吹出しガスの供給は、搬送路１
４に配設されている吹出口１３へのガス供給系とは別の
供給系を設けると、ガス制御が容易になされうる。その
ような別個のガス供給系（図示せず）は、被搬送体１２
の側壁１５への接触防止を確実に行うため、ガス供給に
加えて被搬送体の種類に対応して吹出しガス量の調節を
も行うものとする。すなわち側壁１５に対面する側面の
面積が小さい（ずなわぢ厚さが薄い）被搬送体の場合に
は、ガス量を多くして被搬送体の側面へ加える圧力を大
きくし、逆に側面積が大きい場合には上記よりかはガス
量を少なくして被搬送体が側壁１５に触れることのない
ようにし、それによって効果的な直進性をもった搬送を
行う。The supply of the blowing gas from the blowing outlet 16 is carried out through the conveyance path 1.
If a supply system separate from the gas supply system to the outlet 13 disposed at 4 is provided, gas control can be easily performed. Such a separate gas supply system (not shown)
In order to reliably prevent the object from coming into contact with the side wall 15, in addition to the gas supply, the amount of blown gas is also adjusted depending on the type of object to be transported. In other words, in the case of a transported object whose side surface facing the side wall 15 has a small area (thin thickness), the amount of gas is increased to increase the pressure applied to the side surface of the transported object, and conversely, the side surface area is increased. If the amount is large, the amount of gas is reduced to prevent the object to be transported from touching the side wall 15, thereby achieving effective linear transport.

上述したガス量の調節は、被搬送体の種類に応じ、レギ
ュレータ等（図示せず）を用いた通常の技術で達成され
る。更に、ガス吹出口１６の位置とか寸法も、被搬送体
の種類に対応して適宜設定する。The above-mentioned adjustment of the gas amount can be achieved by a normal technique using a regulator or the like (not shown) depending on the type of object to be transported. Furthermore, the position and dimensions of the gas outlet 16 are also set appropriately depending on the type of object to be transported.

なお上述したガス供給システム以外に、１つのガス供給
系によりガス供給を行うことも可能であり、この場合に
はガス供給量の調整が前記した場合に比べ複雑な機構を
必要とするが、そうであったとしてもガス量の調節は通
常の技術で行うごとが可能である。In addition to the gas supply system described above, it is also possible to supply gas with a single gas supply system, and in this case, adjusting the gas supply amount requires a more complicated mechanism than in the case described above. Even so, the gas amount can be adjusted using normal techniques.

（７）発明の勿Ｊ果 以上、詳細に説明した如く、本発明によれば、被搬送体
が側壁に触れることのない直進性の改良されたエアベア
リングを提供することかできるため、半導体装置製造工
程において例えばウェハもしくはマスクなどをＢｉ　（
Ｍなしに搬送することができ、ウェハの粉末とか破片等
が処理室にウェハと共に運び込まれることが防止される
ので、半導体装置の信頼性と生産性の向上に効果大であ
る。(7) Consequences of the Invention As explained in detail above, according to the present invention, it is possible to provide an air bearing with improved straightness in which the conveyed object does not touch the side wall. In the manufacturing process, for example, wafers or masks are coated with Bi (
Since the wafer can be transported without M, and wafer powder and debris are prevented from being carried into the processing chamber together with the wafer, it is highly effective in improving the reliability and productivity of semiconductor devices.

【図面の簡単な説明】[Brief explanation of drawings]

第り図は従来のエアベアリングを説明するための図で、
同図＋ａ＋はその要部斜視図、同図（ｂ）はその断面図
、第２図（ａｌは本発明実施例要部の斜視図、同図（ｂ
＋は同図（ａｌの１３−Ｂ線に沿う断面図である。 １．１１−　エアベアリング、２．１２−被搬送体、３
．１３．１６−ガス吹出口３ａ・−ガス供給管、４．１
４−搬送路床面５．１５−側壁 第１図 第２図Figure 2 is a diagram to explain a conventional air bearing.
Figure +a+ is a perspective view of the main part, Figure (b) is a sectional view thereof, Figure 2 (al is a perspective view of the main part of the embodiment of the present invention, Figure (b) is a perspective view of the main part,
+ is a sectional view taken along line 13-B in the same figure (al). 1.11- air bearing, 2.12- conveyed object, 3
．． 13.16-Gas outlet 3a--Gas supply pipe, 4.1
4-Conveyance road surface 5.15-Side wall Fig. 1 Fig. 2

Claims (1)

【特許請求の範囲】[Claims] 搬送路面に複数のガス吹出口を有し、且つ該搬送路の両
側に側壁が設けられたエアヘアリングであって、前記側
壁の搬送路側の壁面に複数のガス吹出口を配設してなる
ことを特徴とするエアベアリング。An air hair ring having a plurality of gas outlets on a conveyance path surface and side walls provided on both sides of the conveyance path, the plurality of gas outlets being arranged on the wall surface of the side wall on the side of the conveyance path. Air bearings are characterized by:
JP22838882A 1982-12-27 1982-12-27 Air bearing Pending JPS59121226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22838882A JPS59121226A (en) 1982-12-27 1982-12-27 Air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22838882A JPS59121226A (en) 1982-12-27 1982-12-27 Air bearing

Publications (1)

Publication Number Publication Date
JPS59121226A true JPS59121226A (en) 1984-07-13

Family

ID=16875681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22838882A Pending JPS59121226A (en) 1982-12-27 1982-12-27 Air bearing

Country Status (1)

Country Link
JP (1) JPS59121226A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007084266A (en) * 2005-09-21 2007-04-05 Akira Uehara Article carrying machine
KR100716025B1 (en) * 1998-11-25 2007-05-08 가부시키가이샤 와코무 덴소 Storage unit and storage apparatus of plate-type substrate
ITMI20101024A1 (en) * 2010-06-09 2011-12-10 Off Mec Di Prec E G3 Di Gamba Walter DEVICE AND METHOD FOR THE PRECISELY POSITIONING OF A MINIATURIZED PIECE IN A POSITIONING SEAT
WO2012072266A1 (en) * 2010-12-03 2012-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device and method for handling workpieces
WO2013178786A2 (en) * 2012-06-01 2013-12-05 Dtg International Gmbh Apparatus for and method of aligning and transporting workpieces
US9575092B2 (en) 2013-04-22 2017-02-21 Stmicroelectronics S.R.L. Vibrating device for positioning a miniaturized piece in a testing accommodation, and positioning method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100716025B1 (en) * 1998-11-25 2007-05-08 가부시키가이샤 와코무 덴소 Storage unit and storage apparatus of plate-type substrate
JP2007084266A (en) * 2005-09-21 2007-04-05 Akira Uehara Article carrying machine
JP4736035B2 (en) * 2005-09-21 2011-07-27 旻 上原 Object transporter
ITMI20101024A1 (en) * 2010-06-09 2011-12-10 Off Mec Di Prec E G3 Di Gamba Walter DEVICE AND METHOD FOR THE PRECISELY POSITIONING OF A MINIATURIZED PIECE IN A POSITIONING SEAT
WO2012072266A1 (en) * 2010-12-03 2012-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device and method for handling workpieces
WO2013178786A2 (en) * 2012-06-01 2013-12-05 Dtg International Gmbh Apparatus for and method of aligning and transporting workpieces
WO2013178786A3 (en) * 2012-06-01 2014-03-06 Dtg International Gmbh Apparatus for and method of aligning and transporting workpieces
US9575092B2 (en) 2013-04-22 2017-02-21 Stmicroelectronics S.R.L. Vibrating device for positioning a miniaturized piece in a testing accommodation, and positioning method
US10254332B2 (en) 2013-04-22 2019-04-09 Stmicroelectronics S.R.L. Vibrating device for positioning a miniaturized piece in a testing accommodation, and positioning method

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