TWI714472B - Wafer carrier transfer system - Google Patents

Wafer carrier transfer system Download PDF

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TWI714472B
TWI714472B TW109108159A TW109108159A TWI714472B TW I714472 B TWI714472 B TW I714472B TW 109108159 A TW109108159 A TW 109108159A TW 109108159 A TW109108159 A TW 109108159A TW I714472 B TWI714472 B TW I714472B
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wafer carrier
transportation
space
tool
rail
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TW109108159A
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TW202134157A (en
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李世平
嚴凱軍
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力晶積成電子製造股份有限公司
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Abstract

A wafer carrier transfer system is provided, including a first transporter and a second transporter. The first transporter carries a first wafer carrier, a first rail supports and suspends the first transporter, and the first transporter transports the first wafer carrier along the first rail. The second transporter carries a second wafer carrier, a second rail supports and suspends the second transporter, and the second transporter transports the second wafer carrier along the second rail. The second transporter has a first space and a second space, and the first space is above the second space. The second space is used to carry the second wafer carrier, and the first transporter passes through the first space when transporting the first wafer carrier along the first rail

Description

晶圓載具運輸系統Wafer carrier transportation system

本發明是有關於一種運輸系統，且特別是有關於一種晶圓載具運輸系統。The present invention relates to a transportation system, and in particular to a wafer carrier transportation system.

在半導體元件的製造期間，通常在許多工作站或加工機器上對元件進行處理，必須在各個製程站點之間輸送或運輸半導體晶圓，以進行各種製造製程。一般而言，通常使用空中懸吊式運輸（overhead hoist transfer，OHT）系統以在處理程序中將晶圓載具（例如FOUP，front opening unified pod）從一個工具的加載埠運輸到下一個工具的加載埠。然而，習知的空中懸吊式運輸（OHT）系統大多為單一裝載工具，在裝載、等待或故障排除時可能出現輸送或運輸不順暢的問題，也存在可能的輸送或運輸限制缺點，更具有工具閒置的缺陷。During the manufacturing of semiconductor components, the components are usually processed on many workstations or processing machines, and semiconductor wafers must be transported or transported between various process sites to perform various manufacturing processes. Generally speaking, overhead hoist transfer (OHT) systems are usually used to transport wafer carriers (such as FOUP, front opening unified pod) from the loading port of one tool to the loading of the next tool in the process. port. However, most of the conventional OHT systems are single loading tools. During loading, waiting or troubleshooting, transportation or transportation may not be smooth, and there may also be possible transportation or transportation limitations. The defect of idle tool.

基於上述，如何改善晶圓載具運輸系統在裝載、等待或故障排除時運輸不順暢的問題及限制，為目前所需研究的重要方向。Based on the above, how to improve the problems and limitations of the wafer carrier transportation system when loading, waiting or troubleshooting is not smooth, is an important direction for current research.

本發明提供一種晶圓載具運輸系統，能夠有效地解決在裝載、等待或故障排除時運輸不順暢的問題及限制，更可避免工具閒置的缺陷。The invention provides a wafer carrier transportation system, which can effectively solve the problems and restrictions of unsmooth transportation during loading, waiting or troubleshooting, and can also avoid the defect of idle tools.

本發明的晶圓載具運輸系統包括第一運輸工具以及第二運輸工具。第一運輸工具承載第一晶圓載具，第一軌道支撐且懸吊第一運輸工具，第一運輸工具沿著第一軌道運輸第一晶圓載具。第二運輸工具承載第二晶圓載具，第二軌道支撐且懸吊第二運輸工具，第二運輸工具沿著第二軌道運輸第二晶圓載具。第二運輸工具具有第一空間及第二空間，第一空間在第二空間上方，第二空間用以承載第二晶圓載具，第一運輸工具沿著第一軌道運輸第一晶圓載具時通過第一空間。The wafer carrier transportation system of the present invention includes a first transportation tool and a second transportation tool. The first transportation tool carries the first wafer carrier, the first rail supports and suspends the first transportation tool, and the first transportation tool transports the first wafer carrier along the first rail. The second transportation tool carries the second wafer carrier, the second rail supports and suspends the second transportation tool, and the second transportation tool transports the second wafer carrier along the second rail. The second transportation tool has a first space and a second space. The first space is above the second space. The second space is used to carry the second wafer carrier. When the first transportation tool transports the first wafer carrier along the first track Through the first space.

在本發明的一實施例中，第一空間用以容置第一運輸工具。In an embodiment of the present invention, the first space is used to accommodate the first transportation tool.

在本發明的一實施例中，第一空間的寬度大於第一運輸工具的寬度。In an embodiment of the present invention, the width of the first space is greater than the width of the first vehicle.

在本發明的一實施例中，第一軌道與第二軌道沿著第一軸線平行配置。In an embodiment of the present invention, the first track and the second track are arranged in parallel along the first axis.

在本發明的一實施例中，第二軌道由雙數副軌構成，第一軌道位於雙數副軌之間。In an embodiment of the present invention, the second track is composed of even-numbered sub-tracks, and the first track is located between the even-numbered sub-tracks.

在本發明的一實施例中，第一運輸工具及第二運輸工具沿著第一軸線朝向相反方向或相同方向運輸。In an embodiment of the present invention, the first transportation means and the second transportation means are transported in opposite directions or the same direction along the first axis.

在本發明的一實施例中，第一空間與第二空間沿著第二軸線垂直配置，第二軸線與第一軸線垂直。In an embodiment of the present invention, the first space and the second space are arranged perpendicularly along the second axis, and the second axis is perpendicular to the first axis.

在本發明的一實施例中，第一運輸工具及第二運輸工具沿著第二軸線分別獨立地裝載或卸載第一晶圓載具及第二晶圓載具。In an embodiment of the present invention, the first transportation tool and the second transportation tool independently load or unload the first wafer carrier and the second wafer carrier along the second axis.

在本發明的一實施例中，第一空間用以容置第三晶圓載具。In an embodiment of the present invention, the first space is used to accommodate the third wafer carrier.

在本發明的一實施例中，第三晶圓載具由第一運輸工具承載，當第一運輸工具抵達第一空間時，將第三晶圓載具卸載並放置於第一空間。In an embodiment of the present invention, the third wafer carrier is carried by the first transportation tool, and when the first transportation tool reaches the first space, the third wafer carrier is unloaded and placed in the first space.

在本發明的一實施例中，第一運輸工具提取位於第一空間的第三晶圓載具，並由第一運輸工具運輸且卸載第三晶圓載具。In an embodiment of the present invention, the first transportation tool picks up the third wafer carrier located in the first space, and the third wafer carrier is transported and unloaded by the first transportation tool.

基於上述，本發明的晶圓載具運輸系統包括第一運輸工具以及第二運輸工具，第一運輸工具及第二運輸工具可沿著同一軸線朝向相反方向或相同方向運輸，分別獨立地裝載或卸載第一晶圓載具及第二晶圓載具，因此，可有效地提升運輸效率，也可彈性地切換運輸方向，且不需要緩衝區即可直接裝載或卸載晶圓載具。Based on the above, the wafer carrier transportation system of the present invention includes a first transportation tool and a second transportation tool. The first transportation tool and the second transportation tool can be transported along the same axis in opposite directions or in the same direction, and are independently loaded or unloaded. The first wafer carrier and the second wafer carrier, therefore, can effectively improve the transportation efficiency, can also flexibly switch the transportation direction, and directly load or unload the wafer carrier without a buffer.

下文列舉實施例並配合所附圖式來進行詳細地說明，但所提供之實施例並非用以限制本發明所涵蓋的範圍。此外，圖式僅以說明為目的，並未依照原尺寸作圖。為了方便理解，下述說明中相同的元件將以相同之符號標示來說明。The following examples are listed in conjunction with the accompanying drawings for detailed description, but the provided examples are not intended to limit the scope of the present invention. In addition, the drawings are for illustrative purposes only and are not drawn according to the original size. To facilitate understanding, the same elements in the following description will be described with the same symbols.

圖1是依照本發明的一實施例的一種晶圓載具運輸系統的示意圖。圖2是依照本發明的一實施例的一種晶圓載具運輸系統的運作示意圖。FIG. 1 is a schematic diagram of a wafer carrier transportation system according to an embodiment of the invention. 2 is a schematic diagram of the operation of a wafer carrier transportation system according to an embodiment of the invention.

請先參照圖1，本實施例的晶圓載具運輸系統10包括第一運輸工具100以及第二運輸工具200。第一運輸工具100承載第一晶圓載具110，第一軌道120支撐且懸吊第一運輸工具100，第一運輸工具100沿著第一軌道120運輸第一晶圓載具110。第二運輸工具200承載第二晶圓載具210，第二軌道220支撐且懸吊第二運輸工具200，第二運輸工具200沿著第二軌道220運輸第二晶圓載具210。在本實施例中，晶圓載具運輸系統10例如是空中懸吊式運輸（overhead hoist transfer，OHT）系統，第一運輸工具100及第二運輸工具200例如是空中懸吊式運輸（overhead hoist transfer，OHT）系統的小車，第一晶圓載具110及第二晶圓載具210例如是FOUP（front opening unified pod）。Please refer to FIG. 1 first, the wafer carrier transportation system 10 of this embodiment includes a first transportation tool 100 and a second transportation tool 200. The first transportation tool 100 carries the first wafer carrier 110, the first rail 120 supports and suspends the first transportation tool 100, and the first transportation tool 100 transports the first wafer carrier 110 along the first rail 120. The second transportation tool 200 carries the second wafer carrier 210, the second rail 220 supports and suspends the second transportation tool 200, and the second transportation tool 200 transports the second wafer carrier 210 along the second rail 220. In this embodiment, the wafer carrier transportation system 10 is, for example, an overhead hoist transfer (OHT) system, and the first transportation tool 100 and the second transportation tool 200 are, for example, overhead hoist transfer (OHT). In the trolley of the OHT system, the first wafer carrier 110 and the second wafer carrier 210 are, for example, FOUP (front opening unified pod).

請繼續參照圖1，第一軌道120與第二軌道220沿著第一軸線L1平行配置。更詳細而言，第一軌道120與第二軌道220是沿著同一軸線（第一軸線L1）平行配置，但不一定配置於同一平面上。換言之，雖然圖1所繪示的是第一軌道120與第二軌道220配置於同一平面上，但本發明並不以此為限，第一軌道120與第二軌道220亦可配置於不同平面上。在本實施例中，第二軌道220例如是由雙數副軌220A、220B構成，第一軌道120位於雙數副軌220A、220B之間，但本發明並不以此為限，在第二軌道220能夠支撐且懸吊第二運輸工具200的前提下，亦可依照實際操作情形調整第二軌道220中副軌的數量。此外，雖然圖1所繪示的第一軌道120由單一軌道構成，但本發明並不以此為限，在第一軌道120位於雙數副軌220A、220B之間的前提下，第一軌道120也可由複數個軌道構成。在第一軌道120中可配置有滾輪140，構成第二軌道220的雙數副軌220A、220B可分別配置有滾輪240A、240B。透過第一軌道120中的滾輪140及電磁鐵（未繪示），使第一運輸工具100沿著第一軌道120運輸第一晶圓載具110。透過構成第二軌道220的雙數副軌220A、220B中的滾輪240A、240B及電磁鐵（未繪示），使第二運輸工具200沿著第二軌道220運輸第二晶圓載具210。Please continue to refer to FIG. 1, the first rail 120 and the second rail 220 are arranged in parallel along the first axis L1. In more detail, the first rail 120 and the second rail 220 are arranged in parallel along the same axis (first axis L1), but they are not necessarily arranged on the same plane. In other words, although FIG. 1 shows that the first track 120 and the second track 220 are arranged on the same plane, the present invention is not limited to this. The first track 120 and the second track 220 can also be arranged on different planes. on. In this embodiment, the second track 220 is, for example, composed of even-numbered sub-rails 220A and 220B, and the first track 120 is located between the even-numbered sub-rails 220A and 220B, but the present invention is not limited to this. On the premise that the second transportation tool 200 can be supported and suspended, the number of secondary rails in the second rail 220 can also be adjusted according to actual operating conditions. In addition, although the first track 120 shown in FIG. 1 is composed of a single track, the present invention is not limited to this. On the premise that the first track 120 is located between the even-numbered sub-tracks 220A and 220B, the first track 120 It can also be composed of multiple tracks. The first rail 120 may be provided with rollers 140, and the even-numbered secondary rails 220A and 220B constituting the second rail 220 may be respectively provided with rollers 240A and 240B. Through the roller 140 and the electromagnet (not shown) in the first rail 120, the first transportation tool 100 can transport the first wafer carrier 110 along the first rail 120. Through the rollers 240A and 240B and electromagnets (not shown) in the even-numbered sub-rails 220A and 220B that constitute the second rail 220, the second transport tool 200 transports the second wafer carrier 210 along the second rail 220.

請繼續參照圖1，第二運輸工具200具有第一空間230A及第二空間230B，第一空間230A在第二空間230B上方，第一空間230A與第二空間230B可沿著第二軸線L2垂直配置，第二軸線L2與第一軸線L1垂直。在本實施例中，第二運輸工具200的第二空間230B用以承載第二晶圓載具210。當第一運輸工具100沿著第一軌道120運輸第一晶圓載具110時，可通過第二運輸工具200的第一空間230A。如圖1所示，第一空間230A亦可用以容置裝載有第一晶圓載具110的第一運輸工具100。第二運輸工具200的第一空間230A及第二空間230B寬度可以相同或不同，且第一空間230A的寬度大於第一運輸工具100的寬度，如此一來，才能夠用以容置第一運輸工具100，或使第一運輸工具100沿著第一軌道120運輸第一晶圓載具110時，通過第二運輸工具200的第一空間230A。Please continue to refer to FIG. 1, the second vehicle 200 has a first space 230A and a second space 230B. The first space 230A is above the second space 230B. The first space 230A and the second space 230B can be perpendicular to the second axis L2. Configuration, the second axis L2 is perpendicular to the first axis L1. In this embodiment, the second space 230B of the second transportation tool 200 is used to carry the second wafer carrier 210. When the first transportation tool 100 transports the first wafer carrier 110 along the first rail 120, it can pass through the first space 230A of the second transportation tool 200. As shown in FIG. 1, the first space 230A can also be used to accommodate the first transportation tool 100 loaded with the first wafer carrier 110. The width of the first space 230A and the second space 230B of the second vehicle 200 can be the same or different, and the width of the first space 230A is greater than the width of the first vehicle 100, so that it can be used to accommodate the first vehicle. When the tool 100 or the first transportation tool 100 transports the first wafer carrier 110 along the first rail 120, it passes through the first space 230A of the second transportation tool 200.

請同時參照圖1及圖2，第一運輸工具100及第二運輸工具200可沿著第一軸線L1朝向相反方向或相同方向運輸。舉例而言，第一運輸工具100及第二運輸工具200例如可分別朝向第一方向D1及第二方向D2運輸，第一方向D1及第二方向D2如圖1所示。當第一運輸工具100及第二運輸工具200沿著第一軸線L1朝向相反方向運輸時，可呈現如圖2所示的操作型態，因此，能夠改善習知技術中空中懸吊式運輸（overhead hoist transfer，OHT）系統僅能進行單一方向運輸的缺點，進而提升運輸效率及運輸彈性。在本實施例中，第一運輸工具100及第二運輸工具200可沿著第二軸線L2分別獨立地裝載或卸載第一晶圓載具110及第二晶圓載具210，第一運輸工具100及第二運輸工具200例如可分別使用運輸帶150、250獨立地裝載或卸載第一晶圓載具110及第二晶圓載具210，因此，不需要額外的緩衝區即可順暢地運輸操作。1 and 2 at the same time, the first transportation means 100 and the second transportation means 200 can be transported in opposite directions or the same direction along the first axis L1. For example, the first transportation means 100 and the second transportation means 200 can be transported in a first direction D1 and a second direction D2, respectively. The first direction D1 and the second direction D2 are shown in FIG. 1. When the first transportation means 100 and the second transportation means 200 are transported in opposite directions along the first axis L1, they can present the operation mode as shown in FIG. 2, therefore, it can improve the prior art suspended transportation ( The overhead hoist transfer (OHT) system has the disadvantage of only being able to transport in a single direction, thereby improving transport efficiency and transport flexibility. In this embodiment, the first transportation tool 100 and the second transportation tool 200 can independently load or unload the first wafer carrier 110 and the second wafer carrier 210 along the second axis L2, and the first transportation tool 100 and The second transportation tool 200 can, for example, use the transportation belts 150 and 250 to independently load or unload the first wafer carrier 110 and the second wafer carrier 210. Therefore, the transportation operation can be smoothly performed without requiring an additional buffer zone.

圖3是依照本發明的另一實施例的一種晶圓載具運輸系統的運作示意圖。圖3所示的實施例相似於圖1及圖2所示的實施例，故相同元件以相同標號表示且在此不予贅述。3 is a schematic diagram of the operation of a wafer carrier transportation system according to another embodiment of the present invention. The embodiment shown in FIG. 3 is similar to the embodiment shown in FIG. 1 and FIG. 2, so the same elements are denoted by the same reference numerals and will not be repeated here.

請參照圖3，本實施例與上述第一實施例不同之處在於，第二運輸工具200的第一空間230A較大，除了能夠使第一運輸工具100沿著第一軌道120運輸第一晶圓載具110時通過，更可用以容置額外的第三晶圓載具310。在本實施例中，第三晶圓載具310可先由第一運輸工具100承載，當第一運輸工具100抵達第一空間230A時，將第三晶圓載具310卸載並放置於第一空間230A。另一方面，當第三晶圓載具310放置於第一空間230A時，也可藉由第一運輸工具100提取位於第一空間230A的第三晶圓載具310，並由第一運輸工具100運輸且卸載第三晶圓載具310。如此一來，第二運輸工具200的第一空間230A可作為額外的儲存區使用，用以容置第三晶圓載具310，也可使運輸容量加倍，並提升運輸彈性。Referring to FIG. 3, the difference between this embodiment and the above-mentioned first embodiment is that the first space 230A of the second transport 200 is larger, except that the first transport 100 can transport the first crystal along the first rail 120. When the round carrier 110 passes, it can be used to accommodate an additional third wafer carrier 310. In this embodiment, the third wafer carrier 310 may be first carried by the first transportation tool 100. When the first transportation tool 100 arrives at the first space 230A, the third wafer carrier 310 is unloaded and placed in the first space 230A . On the other hand, when the third wafer carrier 310 is placed in the first space 230A, the third wafer carrier 310 located in the first space 230A can also be picked up by the first transportation tool 100 and transported by the first transportation tool 100 And the third wafer carrier 310 is unloaded. In this way, the first space 230A of the second transportation tool 200 can be used as an additional storage area for accommodating the third wafer carrier 310, which can also double the transportation capacity and improve transportation flexibility.

綜上所述，本發明的晶圓載具運輸系統包括第一運輸工具及第二運輸工具，第一運輸工具及第二運輸工具可沿著同一軸線朝向相反方向或相同方向運輸，因此，第二運輸工具可視為第一運輸工具的延伸，能夠改善習知技術中空中懸吊式運輸（overhead hoist transfer，OHT）系統僅能進行單一方向運輸的缺點，進而提升運輸效率及運輸彈性。此外，第一運輸工具及第二運輸工具可沿著同一軸線分別獨立地裝載或卸載第一晶圓載具及第二晶圓載具，因此，不需要緩衝區即可順暢地運輸操作。另一方面，第二運輸工具可用以容置第三晶圓載具，因此，可作為額外的儲存區使用，也可使運輸容量增加，並提升運輸彈性。如此一來，本發明的晶圓載具運輸系統能夠有效地在裝載、等待或故障排除時運輸不順暢的問題及限制，更可避免工具閒置的缺陷。In summary, the wafer carrier transportation system of the present invention includes a first transportation tool and a second transportation tool. The first transportation tool and the second transportation tool can be transported in opposite directions or the same direction along the same axis. Therefore, the second The means of transportation can be regarded as an extension of the first means of transportation, which can improve the disadvantage of the overhead hoist transfer (OHT) system in the prior art that can only transport in a single direction, thereby improving transportation efficiency and transportation flexibility. In addition, the first transportation tool and the second transportation tool can independently load or unload the first wafer carrier and the second wafer carrier along the same axis. Therefore, smooth transportation operations can be performed without a buffer zone. On the other hand, the second transportation tool can be used to accommodate the third wafer carrier, so it can be used as an additional storage area, and can also increase the transportation capacity and improve transportation flexibility. In this way, the wafer carrier transportation system of the present invention can effectively prevent the problems and restrictions of unsmooth transportation during loading, waiting or troubleshooting, and can also avoid the defects of idle tools.

10:晶圓載具運輸系統 100:第一運輸工具 110:第一晶圓載具 120:第一軌道 140、240A、240B:滾輪 150、250:運輸帶 200:第二運輸工具 210:第二晶圓載具 220:第二軌道 220A、220B:副軌 230A:第一空間 230B:第二空間 310:第三晶圓載具 D1:第一方向 D2:第二方向 L1:第一軸線 L2:第二軸線10: Wafer carrier transportation system 100: The first means of transportation 110: The first wafer carrier 120: first track 140, 240A, 240B: roller 150, 250: conveyor belt 200: The second means of transport 210: second wafer carrier 220: second track 220A, 220B: secondary rail 230A: the first space 230B: second space 310: Third wafer carrier D1: First direction D2: second direction L1: first axis L2: second axis

圖1是依照本發明的一實施例的一種晶圓載具運輸系統的示意圖。 圖2是依照本發明的一實施例的一種晶圓載具運輸系統的運作示意圖。 圖3是依照本發明的另一實施例的一種晶圓載具運輸系統的運作示意圖。 FIG. 1 is a schematic diagram of a wafer carrier transportation system according to an embodiment of the invention. 2 is a schematic diagram of the operation of a wafer carrier transportation system according to an embodiment of the invention. 3 is a schematic diagram of the operation of a wafer carrier transportation system according to another embodiment of the present invention.

10:晶圓載具運輸系統 10: Wafer carrier transportation system

100:第一運輸工具 100: The first means of transportation

110:第一晶圓載具 110: The first wafer carrier

120:第一軌道 120: first track

140、240A、240B:滾輪 140, 240A, 240B: roller

200:第二運輸工具 200: The second means of transport

210:第二晶圓載具 210: second wafer carrier

220:第二軌道 220: second track

220A、220B:副軌 220A, 220B: secondary rail

230A:第一空間 230A: the first space

230B:第二空間 230B: second space

D1:第一方向 D1: First direction

D2:第二方向 D2: second direction

L1:第一軸線 L1: first axis

L2:第二軸線 L2: second axis

Claims (11)

一種晶圓載具運輸系統，包括： 第一運輸工具，承載第一晶圓載具，第一軌道支撐且懸吊所述第一運輸工具，所述第一運輸工具沿著所述第一軌道運輸所述第一晶圓載具；以及 第二運輸工具，承載第二晶圓載具，第二軌道支撐且懸吊所述第二運輸工具，所述第二運輸工具沿著所述第二軌道運輸所述第二晶圓載具， 其中所述第二運輸工具具有第一空間及第二空間，所述第一空間在所述第二空間上方，所述第二空間用以承載所述第二晶圓載具，所述第一運輸工具沿著所述第一軌道運輸所述第一晶圓載具時通過所述第一空間。 A wafer carrier transportation system includes: A first transportation tool that carries a first wafer carrier, a first rail supports and suspends the first transportation tool, and the first transportation tool transports the first wafer carrier along the first rail; and A second transportation tool carrying a second wafer carrier, a second rail supporting and suspending the second transportation tool, and the second transportation tool transporting the second wafer carrier along the second rail, The second transportation tool has a first space and a second space, the first space is above the second space, and the second space is used to carry the second wafer carrier, and the first transportation The tool passes through the first space when transporting the first wafer carrier along the first rail. 如請求項1所述的晶圓載具運輸系統，其中所述第一空間用以容置所述第一運輸工具。The wafer carrier transportation system according to claim 1, wherein the first space is used to accommodate the first transportation tool. 如請求項1所述的晶圓載具運輸系統，其中所述第一空間的寬度大於所述第一運輸工具的寬度。The wafer carrier transportation system according to claim 1, wherein the width of the first space is greater than the width of the first transportation tool. 如請求項1所述的晶圓載具運輸系統，其中所述第一軌道與所述第二軌道沿著第一軸線平行配置。The wafer carrier transportation system according to claim 1, wherein the first rail and the second rail are arranged in parallel along a first axis. 如請求項4所述的晶圓載具運輸系統，其中所述第二軌道由雙數副軌構成，所述第一軌道位於所述雙數副軌之間。The wafer carrier transportation system according to claim 4, wherein the second track is composed of even-numbered sub-rails, and the first track is located between the even-numbered sub-rails. 如請求項4所述的晶圓載具運輸系統，其中所述第一運輸工具及所述第二運輸工具沿著所述第一軸線朝向相反方向或相同方向運輸。The wafer carrier transportation system according to claim 4, wherein the first transportation means and the second transportation means are transported in opposite directions or the same direction along the first axis. 如請求項4所述的晶圓載具運輸系統，其中所述第一空間與所述第二空間沿著第二軸線垂直配置，所述第二軸線與所述第一軸線垂直。The wafer carrier transportation system according to claim 4, wherein the first space and the second space are arranged perpendicularly along a second axis, and the second axis is perpendicular to the first axis. 如請求項7所述的晶圓載具運輸系統，其中所述第一運輸工具及所述第二運輸工具沿著所述第二軸線分別獨立地裝載或卸載所述第一晶圓載具及所述第二晶圓載具。The wafer carrier transportation system according to claim 7, wherein the first transportation tool and the second transportation tool independently load or unload the first wafer carrier and the second transportation tool along the second axis. The second wafer carrier. 如請求項1所述的晶圓載具運輸系統，其中所述第一空間用以容置第三晶圓載具。The wafer carrier transportation system according to claim 1, wherein the first space is used to accommodate a third wafer carrier. 如請求項9所述的晶圓載具運輸系統，其中所述第三晶圓載具由所述第一運輸工具承載，當所述第一運輸工具抵達所述第一空間時，將所述第三晶圓載具卸載並放置於所述第一空間。The wafer carrier transportation system according to claim 9, wherein the third wafer carrier is carried by the first transportation tool, and when the first transportation tool reaches the first space, the third wafer carrier The wafer carrier is unloaded and placed in the first space. 如請求項9所述的晶圓載具運輸系統，其中所述第一運輸工具提取位於所述第一空間的所述第三晶圓載具，並由所述第一運輸工具運輸且卸載所述第三晶圓載具。The wafer carrier transportation system according to claim 9, wherein the first transportation tool extracts the third wafer carrier located in the first space, and is transported by the first transportation tool and unloaded Three wafer carriers.
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