JPS5365664A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5365664A
JPS5365664A JP14168276A JP14168276A JPS5365664A JP S5365664 A JPS5365664 A JP S5365664A JP 14168276 A JP14168276 A JP 14168276A JP 14168276 A JP14168276 A JP 14168276A JP S5365664 A JPS5365664 A JP S5365664A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
semiconductor
danger
avoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14168276A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14168276A priority Critical patent/JPS5365664A/en
Publication of JPS5365664A publication Critical patent/JPS5365664A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To avoid the danger in that the hydrogen gas is used in a high-temperature furnace, by carrying out a thermal treatment after forming a hydrogen injection layer near the wafer surface under the manufacture process of the semiconductor.
COPYRIGHT: (C)1978,JPO&Japio
JP14168276A 1976-11-24 1976-11-24 Manufacture of semiconductor device Pending JPS5365664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14168276A JPS5365664A (en) 1976-11-24 1976-11-24 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14168276A JPS5365664A (en) 1976-11-24 1976-11-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5365664A true JPS5365664A (en) 1978-06-12

Family

ID=15297745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14168276A Pending JPS5365664A (en) 1976-11-24 1976-11-24 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5365664A (en)

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